JPS62142760A - Vacuum deposition device - Google Patents

Abstract

PURPOSE:To reduce the outside shape of a cooling base plate and to reduce the size of a vacuum vessel by providing the cooling base plate disposed with crucibles for containing materials to be evaporated on a straight line and making said plate movable, laterally and vertically. CONSTITUTION:This vacuum deposition device is formed of the cooling base plate 6 and a driving system 9 for moving said plate to the right and left and lifting the same upward and downward. The base plate 6 is disposed with plural pieces of the crucibles 5 for containing the materials to be evaporated on the straight line. The materials to be evaporated, heated and evaporated by an electron beam 7 are deposited on substrates in a vacuum vessel.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a vacuum evaporation apparatus. 0. Prior Art In recent years, crucibles for storing materials to be deposited in vacuum evaporation apparatuses have been used for continuous film formation processes and In response to multilayer films, a plurality of them are arranged and sequentially moved to the electron beam heating position. This eliminates the need to return the vacuum chamber to atmospheric pressure and replace the crucible each time the material to be deposited is replenished or replaced during continuous deposition, making continuous deposition and multilayer film deposition easier. Ta.

Hereinafter, the drive mechanism for the plurality of crucibles mentioned above will be explained.

FIGS. 3 and 4 show a conventional drive mechanism for a plurality of crucibles. In FIG. 3, 1 is a crucible containing a substance to be evaporated. 2 is a cooling base on which a plurality of crucibles 1 are arranged concentrically, 3 is an electron gun, and 4 is a deflection magnetic field for deflecting the electron beam generated by the electron gun 3.

The operation of the drive mechanism for a plurality of crucibles configured as described above will be described below.

By rotating a cooling base 2 on which a plurality of crucibles 1 are arranged concentrically, any crucible 1 is moved to a heating position where it is irradiated with an electron beam generated by an electron gun 3 and deflected by a deflection magnetic field 3. The material to be evaporated contained in the crucible 1 is heated and evaporated. Each time the material to be evaporated is replenished or replaced in the vapor deposition process, the cooling base rotates and moves the crucible containing the predetermined material to be evaporated to the electron beam irradiation position.

Problems to be Solved by the Invention However, with the above configuration, when a large crucible is used for continuous deposition over a long period of time, such as in a winding deposition system, the cooling base on which the crucibles are arranged concentrically is If the vacuum chamber becomes too large, there is a problem that the exhaust of the vacuum chamber and the drive mechanism for the cooling base are too expensive.

It is known that the height of the evaporation surface of the material to be evaporated in the crucible is correlated with the film thickness distribution on the deposition substrate, and the height of the crucible,
That is, it is necessary to adjust the height of the evaporation surface of the material to be evaporated, but this adjustment was not possible with the conventional configuration.

In view of the above-mentioned problems, the present invention includes a small cooling base on which a plurality of crucibles are arranged and a drive mechanism that enables exchange of the crucibles and adjustment of the height of the evaporation surface of the material to be evaporated in the crucible. The present invention provides a vacuum evaporation apparatus that provides a vacuum evaporation system.

Means for Solving the Problems In order to solve the above problems, the vacuum evaporation apparatus of the present invention has the following features:
A cooling base in which a plurality of crucibles containing substances to be evaporated are arranged in a straight line, and 1 for driving the cooling base left and right and up and down.
It is equipped with a Todo system.

Effects The present invention has the above-described configuration, and even when using a large crucible, the crucible is arranged in a straight line, so the cooling base can be adjusted compared to the conventional concentric cooling base.

EXAMPLE Hereinafter, a vacuum evaporation apparatus according to an example of the present invention will be described with reference to the drawings.

FIG. 1 shows the configuration of an evaporation source of a vacuum evaporation apparatus in an embodiment of the present invention. 5 is a crucible containing the material to be evaporated, 6 is a cooling base on which a plurality of crucibles 6 are arranged in a straight line, 7 is an electron gun, and 8 is a deflection magnetic field for deflecting the electron beam generated from the electron gun 7. , 9 is a drive system that pivots the cooling base 6 horizontally and vertically with respect to the electron gun 7.
The figure is a cross-sectional view of the evaporation source.

The operation of the vacuum evaporation apparatus configured as described above will be described below with reference to FIGS. 1 and 2.

A cooling base 6 on which a crucible 5 containing a substance to be evaporated is arranged in a straight line is moved left and right by a drive system 9. This makes it possible to replenish and exchange materials to be evaporated.

In addition, by moving the cooling base 6 up and down by the I drive system 9, the height of the crucible 5 placed on the cooling base 6 changes, and the height of the vaporized material in the crucible 6 changes. can be adjusted.

As described above, by arranging a plurality of crucibles on the cooling base in a straight line, the external size of the cooling base can be significantly reduced, and the cooling base can be raised and lowered in all directions. As described above, the present invention provides a cooling base in which a plurality of crucibles containing illuminated inventions are arranged in a straight line and arranged in a straight line with IR. By providing a stand and a drive system that moves the cooling base from side to side and raises and lowers it up and down, the outer size of the cooling base can be reduced, and the vacuum chamber can be made smaller accordingly.

[Brief explanation of drawings]

FIG. 1 is a plan view showing the configuration of an evaporation source in a four-vacuum evaporation apparatus according to an embodiment of the present invention, FIG. 2 is a sectional view of the evaporation source, and FIG. A plan view showing,
FIG. 4 is a cross-sectional view of the evaporation source. 5... Crucible, 6... Cooling base, 7.
・Electron gun, 8...deflection magnetic field, 9...1 river motion system. Name of agent: Patent attorney Toshio Nakao and 1 other person5-
--Rufu L Figure 2 Figure 3 Figure 4

Claims (1)

[Claims] A vacuum evaporation device that heats and evaporates a material to be evaporated with an electron beam in a vacuum chamber whose interior can be evacuated, and deposits the material on a substrate,
Vacuum evaporation characterized by comprising a cooling base in which a plurality of crucibles containing the material to be evaporated are arranged in a straight line, and a drive system that moves the cooling base from side to side and raises and lowers it up and down. Device.