JPH0379434B2 - - Google Patents

Description

[Detailed description of the invention] Industrial applications The present invention relates to a vacuum evaporation apparatus.

BACKGROUND ART In recent years, a plurality of crucibles for storing materials to be deposited in a vacuum evaporation apparatus have been arranged and successively moved to an electron beam heating position in response to continuous and multilayer film formation processes. ing. This eliminates the need to return the vacuum chamber to atmospheric pressure and replace the crucible each time the material to be deposited is replenished or replaced during continuous deposition, making continuous deposition and multilayer film deposition easier. Ta.

Hereinafter, the drive mechanism for the plurality of crucibles mentioned above will be explained.

FIGS. 3 and 4 show a conventional drive mechanism for a plurality of crucibles. In FIG. 3, 1 is a crucible containing a substance to be evaporated. 2 melting pot 1
3 is an electron gun, and 4 is a deflection magnetic field for deflecting the electron beam generated by the electron gun 3.

The operation of the drive mechanism for a plurality of crucibles configured as described above will be described below.

By rotating a cooling base 2 on which a plurality of crucibles 1 are arranged concentrically, any crucible 1 is moved to a heating position where it is irradiated with an electron beam generated by an electron gun 3 and deflected by a deflection magnetic field 3. The material to be evaporated contained in the crucible 1 is heated and evaporated. Each time the material to be evaporated is replenished or replaced in the vapor deposition process, the cooling base rotates and moves the crucible containing the predetermined material to be evaporated to the electron beam irradiation position.

Problems to be Solved by the Invention However, with the above configuration, when a large crucible is used for continuous deposition over a long period of time, such as in a winding deposition device, the cooling base on which the crucibles are arranged concentrically is There was a problem in that the vacuum chamber became too large and the exhaust of the vacuum chamber and the drive mechanism for the cooling base were too expensive.

Also, the height of the evaporation surface of the material to be evaporated in the crucible is
It is known that there is a correlation with the film thickness distribution on the deposition substrate.
Although it is necessary to adjust the height of the crucible, that is, the height of the evaporation surface of the material to be evaporated, this adjustment has not been possible with the conventional configuration.

In view of the above-mentioned problems, the present invention includes a small cooling base on which a plurality of crucibles are arranged, and a drive mechanism that enables exchange of the crucibles and adjustment of the height of the evaporation surface of the material to be evaporated in the crucible. A vacuum evaporation device is provided.

Means for Solving the Problems In order to solve the above problems, the vacuum evaporation apparatus of the present invention includes a cooling base in which a plurality of crucibles containing materials to be evaporated are arranged in a straight line; It is equipped with a drive system that drives left and right and up and down.

Effects The present invention has the above-described configuration, and even when a large crucible is used, the crucible is arranged in a straight line, so the outer diameter of the cooling base is less than half that of a conventional concentric cooling base. At the same time, since the cooling base can be moved up and down, the height of the evaporation surface of the material to be evaporated in the crucible can be adjusted.

Embodiment A vacuum evaporation apparatus according to an embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows the configuration of an evaporation source of a vacuum evaporation apparatus in an embodiment of the present invention. 5 is a crucible containing the material to be evaporated; 6 is a cooling base on which a plurality of crucibles 5 are arranged in a straight line; 7 is an electron gun; 8 is a deflection magnetic field for deflecting the electron beam generated from the electron gun 7; is a drive system that drives the cooling base 6 horizontally and vertically relative to the electron gun 7. FIG. 2 is a cross-sectional view of the evaporation source.

The operation of the vacuum evaporation apparatus configured as described above will be described below with reference to FIGS. 1 and 2.

By moving the cooling base 6 on which the crucible 5 containing the material to be evaporated is arranged in a straight line from side to side by the drive system 9, it is brought to the irradiation heating position of the electron beam generated from the electron gun 7 and deflected by the deflection magnetic field 8. A predetermined crucible 5 moves. This makes it possible to replenish and replace the material to be evaporated.

In addition, by moving the cooling base 6 up and down by the drive system 9, the crucible 5 placed on the cooling base 6 is moved up and down.
The height of the evaporation surface of the material to be evaporated in the crucible 5 can be adjusted.

As described above, according to this embodiment, by arranging a plurality of crucibles on the cooling base in a straight line,
In addition to being able to significantly reduce the external size of the cooling base,
By moving the cooling base up and down, the height of the evaporation surface inside the crucible can be adjusted.

Effects of the Invention As described above, the present invention provides a cooling base in which a plurality of crucibles containing the invention to be vaporized are arranged in a straight line;
By providing a drive system that moves the cooling base from side to side and raises and lowers it up and down, the outer size of the cooling base can be reduced, thereby making it possible to downsize the vacuum chamber and simplify the drive system.
The height of the evaporation surface of the evaporation object can be adjusted.

[Brief explanation of drawings]

FIG. 1 is a plan view showing the configuration of an evaporation source in a vacuum evaporation apparatus according to an embodiment of the present invention, FIG. 2 is a sectional view of the evaporation source, and FIG. 3 is a diagram showing the configuration of an evaporation source in a conventional vacuum evaporation apparatus. The plan view and FIG. 4 are cross-sectional views of the evaporation source. 5... Crucible, 6... Cooling base, 7... Electron gun, 8... Deflection magnetic field, 9... Drive system.

Claims (1)

[Claims] 1 A vacuum evaporation apparatus that heats and evaporates a material to be evaporated with an electron beam in a vacuum chamber whose interior can be evacuated, and deposits the material on a substrate, wherein a plurality of crucibles containing the material to be evaporated are arranged in a straight line. 1. A vacuum evaporation apparatus comprising: a cooling base; and a drive system that moves the cooling base from side to side and raises and lowers it up and down.