JPS62142375A - 光半導体装置 - Google Patents

光半導体装置

Info

Publication number
JPS62142375A
JPS62142375A JP60283614A JP28361485A JPS62142375A JP S62142375 A JPS62142375 A JP S62142375A JP 60283614 A JP60283614 A JP 60283614A JP 28361485 A JP28361485 A JP 28361485A JP S62142375 A JPS62142375 A JP S62142375A
Authority
JP
Japan
Prior art keywords
film
conductivity type
region
nitride
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60283614A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0473637B2 (enrdf_load_stackoverflow
Inventor
Hakobu Miyoshi
三好　運
Masayuki Yamaguchi
正之 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP60283614A priority Critical patent/JPS62142375A/ja
Publication of JPS62142375A publication Critical patent/JPS62142375A/ja
Publication of JPH0473637B2 publication Critical patent/JPH0473637B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Light Receiving Elements (AREA)
JP60283614A 1985-12-17 1985-12-17 光半導体装置 Granted JPS62142375A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60283614A JPS62142375A (ja) 1985-12-17 1985-12-17 光半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60283614A JPS62142375A (ja) 1985-12-17 1985-12-17 光半導体装置

Publications (2)

Publication Number Publication Date
JPS62142375A true JPS62142375A (ja) 1987-06-25
JPH0473637B2 JPH0473637B2 (enrdf_load_stackoverflow) 1992-11-24

Family

ID=17667782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60283614A Granted JPS62142375A (ja) 1985-12-17 1985-12-17 光半導体装置

Country Status (1)

Country Link
JP (1) JPS62142375A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01248676A (ja) * 1988-03-30 1989-10-04 Matsushita Electron Corp 光半導体装置
JPH03206671A (ja) * 1990-01-08 1991-09-10 Nec Corp フォトダイオード
JP2001028454A (ja) * 1999-07-15 2001-01-30 Sumitomo Electric Ind Ltd 半導体受光素子

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01248676A (ja) * 1988-03-30 1989-10-04 Matsushita Electron Corp 光半導体装置
JPH03206671A (ja) * 1990-01-08 1991-09-10 Nec Corp フォトダイオード
JP2001028454A (ja) * 1999-07-15 2001-01-30 Sumitomo Electric Ind Ltd 半導体受光素子

Also Published As

Publication number Publication date
JPH0473637B2 (enrdf_load_stackoverflow) 1992-11-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term