JPH0473637B2 - - Google Patents

Info

Publication number
JPH0473637B2
JPH0473637B2 JP60283614A JP28361485A JPH0473637B2 JP H0473637 B2 JPH0473637 B2 JP H0473637B2 JP 60283614 A JP60283614 A JP 60283614A JP 28361485 A JP28361485 A JP 28361485A JP H0473637 B2 JPH0473637 B2 JP H0473637B2
Authority
JP
Japan
Prior art keywords
film
conductivity type
type region
nitride film
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60283614A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62142375A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP60283614A priority Critical patent/JPS62142375A/ja
Publication of JPS62142375A publication Critical patent/JPS62142375A/ja
Publication of JPH0473637B2 publication Critical patent/JPH0473637B2/ja
Granted legal-status Critical Current

Links

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  • Light Receiving Elements (AREA)
JP60283614A 1985-12-17 1985-12-17 光半導体装置 Granted JPS62142375A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60283614A JPS62142375A (ja) 1985-12-17 1985-12-17 光半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60283614A JPS62142375A (ja) 1985-12-17 1985-12-17 光半導体装置

Publications (2)

Publication Number Publication Date
JPS62142375A JPS62142375A (ja) 1987-06-25
JPH0473637B2 true JPH0473637B2 (enrdf_load_stackoverflow) 1992-11-24

Family

ID=17667782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60283614A Granted JPS62142375A (ja) 1985-12-17 1985-12-17 光半導体装置

Country Status (1)

Country Link
JP (1) JPS62142375A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01248676A (ja) * 1988-03-30 1989-10-04 Matsushita Electron Corp 光半導体装置
JPH03206671A (ja) * 1990-01-08 1991-09-10 Nec Corp フォトダイオード
JP3386011B2 (ja) * 1999-07-15 2003-03-10 住友電気工業株式会社 半導体受光素子

Also Published As

Publication number Publication date
JPS62142375A (ja) 1987-06-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term