JPS62128138A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS62128138A
JPS62128138A JP26730385A JP26730385A JPS62128138A JP S62128138 A JPS62128138 A JP S62128138A JP 26730385 A JP26730385 A JP 26730385A JP 26730385 A JP26730385 A JP 26730385A JP S62128138 A JPS62128138 A JP S62128138A
Authority
JP
Japan
Prior art keywords
groove
insulating
position detection
detection mark
position detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26730385A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0478177B2 (enrdf_load_stackoverflow
Inventor
Takayuki Kamiya
孝行 神谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP26730385A priority Critical patent/JPS62128138A/ja
Publication of JPS62128138A publication Critical patent/JPS62128138A/ja
Publication of JPH0478177B2 publication Critical patent/JPH0478177B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP26730385A 1985-11-29 1985-11-29 半導体装置 Granted JPS62128138A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26730385A JPS62128138A (ja) 1985-11-29 1985-11-29 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26730385A JPS62128138A (ja) 1985-11-29 1985-11-29 半導体装置

Publications (2)

Publication Number Publication Date
JPS62128138A true JPS62128138A (ja) 1987-06-10
JPH0478177B2 JPH0478177B2 (enrdf_load_stackoverflow) 1992-12-10

Family

ID=17442952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26730385A Granted JPS62128138A (ja) 1985-11-29 1985-11-29 半導体装置

Country Status (1)

Country Link
JP (1) JPS62128138A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02164018A (ja) * 1988-12-19 1990-06-25 Sony Corp 半導体装置の製造方法
JP2007288213A (ja) * 2007-06-25 2007-11-01 Fuji Electric Device Technology Co Ltd 半導体基板の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02164018A (ja) * 1988-12-19 1990-06-25 Sony Corp 半導体装置の製造方法
JP2007288213A (ja) * 2007-06-25 2007-11-01 Fuji Electric Device Technology Co Ltd 半導体基板の製造方法

Also Published As

Publication number Publication date
JPH0478177B2 (enrdf_load_stackoverflow) 1992-12-10

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