JPS62120474A - 薄膜製造装置 - Google Patents
薄膜製造装置Info
- Publication number
- JPS62120474A JPS62120474A JP25985685A JP25985685A JPS62120474A JP S62120474 A JPS62120474 A JP S62120474A JP 25985685 A JP25985685 A JP 25985685A JP 25985685 A JP25985685 A JP 25985685A JP S62120474 A JPS62120474 A JP S62120474A
- Authority
- JP
- Japan
- Prior art keywords
- film
- temperature
- thin film
- polymer film
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 34
- 239000010408 film Substances 0.000 claims abstract description 68
- 229920006254 polymer film Polymers 0.000 claims abstract description 54
- 230000005291 magnetic effect Effects 0.000 claims abstract description 30
- 238000010438 heat treatment Methods 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 238000004519 manufacturing process Methods 0.000 claims description 29
- 230000015572 biosynthetic process Effects 0.000 claims description 11
- 239000002184 metal Substances 0.000 abstract description 23
- 229910052751 metal Inorganic materials 0.000 abstract description 23
- 238000004544 sputter deposition Methods 0.000 abstract description 14
- 230000037303 wrinkles Effects 0.000 description 16
- 238000000034 method Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 229910000889 permalloy Inorganic materials 0.000 description 3
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25985685A JPS62120474A (ja) | 1985-11-21 | 1985-11-21 | 薄膜製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25985685A JPS62120474A (ja) | 1985-11-21 | 1985-11-21 | 薄膜製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62120474A true JPS62120474A (ja) | 1987-06-01 |
| JPH0435555B2 JPH0435555B2 (enrdf_load_stackoverflow) | 1992-06-11 |
Family
ID=17339922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25985685A Granted JPS62120474A (ja) | 1985-11-21 | 1985-11-21 | 薄膜製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62120474A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02166280A (ja) * | 1988-12-21 | 1990-06-26 | Matsushita Electric Ind Co Ltd | フイルムの温度処理方法 |
| JP2016204727A (ja) * | 2015-04-28 | 2016-12-08 | 東レ株式会社 | 成膜装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59162274A (ja) * | 1983-03-07 | 1984-09-13 | Anelva Corp | 連続薄膜製造装置 |
-
1985
- 1985-11-21 JP JP25985685A patent/JPS62120474A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59162274A (ja) * | 1983-03-07 | 1984-09-13 | Anelva Corp | 連続薄膜製造装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02166280A (ja) * | 1988-12-21 | 1990-06-26 | Matsushita Electric Ind Co Ltd | フイルムの温度処理方法 |
| JP2016204727A (ja) * | 2015-04-28 | 2016-12-08 | 東レ株式会社 | 成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0435555B2 (enrdf_load_stackoverflow) | 1992-06-11 |
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