JPS6211960Y2 - - Google Patents

Info

Publication number
JPS6211960Y2
JPS6211960Y2 JP1983025111U JP2511183U JPS6211960Y2 JP S6211960 Y2 JPS6211960 Y2 JP S6211960Y2 JP 1983025111 U JP1983025111 U JP 1983025111U JP 2511183 U JP2511183 U JP 2511183U JP S6211960 Y2 JPS6211960 Y2 JP S6211960Y2
Authority
JP
Japan
Prior art keywords
holder
push rod
workpiece
sputtering
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983025111U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59133664U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2511183U priority Critical patent/JPS59133664U/ja
Publication of JPS59133664U publication Critical patent/JPS59133664U/ja
Application granted granted Critical
Publication of JPS6211960Y2 publication Critical patent/JPS6211960Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2511183U 1983-02-24 1983-02-24 スパツタリング装置 Granted JPS59133664U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2511183U JPS59133664U (ja) 1983-02-24 1983-02-24 スパツタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2511183U JPS59133664U (ja) 1983-02-24 1983-02-24 スパツタリング装置

Publications (2)

Publication Number Publication Date
JPS59133664U JPS59133664U (ja) 1984-09-07
JPS6211960Y2 true JPS6211960Y2 (cg-RX-API-DMAC7.html) 1987-03-24

Family

ID=30156114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2511183U Granted JPS59133664U (ja) 1983-02-24 1983-02-24 スパツタリング装置

Country Status (1)

Country Link
JP (1) JPS59133664U (cg-RX-API-DMAC7.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50106378A (cg-RX-API-DMAC7.html) * 1974-01-30 1975-08-21
JPS584651B2 (ja) * 1975-09-25 1983-01-27 イチコウコウギヨウ カブシキガイシヤ シヤリヨウヨウミラ−

Also Published As

Publication number Publication date
JPS59133664U (ja) 1984-09-07

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