JPS62106644A - 半導体構造形成方法 - Google Patents

半導体構造形成方法

Info

Publication number
JPS62106644A
JPS62106644A JP61219917A JP21991786A JPS62106644A JP S62106644 A JPS62106644 A JP S62106644A JP 61219917 A JP61219917 A JP 61219917A JP 21991786 A JP21991786 A JP 21991786A JP S62106644 A JPS62106644 A JP S62106644A
Authority
JP
Japan
Prior art keywords
polyimide
layer
etching
trench
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61219917A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0347740B2 (https=
Inventor
ジェームズ・ジョン・ドウァティ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS62106644A publication Critical patent/JPS62106644A/ja
Publication of JPH0347740B2 publication Critical patent/JPH0347740B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/286—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of organic materials
    • H10P50/287—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of organic materials by chemical means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/014—Manufacture or treatment of isolation regions comprising dielectric materials using trench refilling with dielectric materials, e.g. shallow trench isolations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H10W10/17—Isolation regions comprising dielectric materials formed using trench refilling with dielectric materials, e.g. shallow trench isolations

Landscapes

  • Element Separation (AREA)
  • Drying Of Semiconductors (AREA)
JP61219917A 1985-10-31 1986-09-19 半導体構造形成方法 Granted JPS62106644A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/793,400 US4654120A (en) 1985-10-31 1985-10-31 Method of making a planar trench semiconductor structure
US793400 1985-10-31

Publications (2)

Publication Number Publication Date
JPS62106644A true JPS62106644A (ja) 1987-05-18
JPH0347740B2 JPH0347740B2 (https=) 1991-07-22

Family

ID=25159837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61219917A Granted JPS62106644A (ja) 1985-10-31 1986-09-19 半導体構造形成方法

Country Status (5)

Country Link
US (1) US4654120A (https=)
EP (1) EP0224039B1 (https=)
JP (1) JPS62106644A (https=)
CA (1) CA1267349A (https=)
DE (1) DE3672570D1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02183552A (ja) * 1989-01-09 1990-07-18 Nec Corp 集積回路の製造方法
JP2012054615A (ja) * 2007-01-04 2012-03-15 Beijing Boe Optoelectronics Technology Co Ltd Ｔｆｔアレイ構造及びその製造方法

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4725562A (en) * 1986-03-27 1988-02-16 International Business Machines Corporation Method of making a contact to a trench isolated device
US4836885A (en) * 1988-05-03 1989-06-06 International Business Machines Corporation Planarization process for wide trench isolation
DE3914065A1 (de) * 1989-04-28 1990-10-31 Leybold Ag Vorrichtung zur durchfuehrung von plasma-aetzverfahren
DE4300765C1 (de) * 1993-01-14 1993-12-23 Bosch Gmbh Robert Verfahren zum Planarisieren grabenförmiger Strukturen
US5521422A (en) * 1994-12-02 1996-05-28 International Business Machines Corporation Corner protected shallow trench isolation device
US5705428A (en) * 1995-08-03 1998-01-06 Chartered Semiconductor Manufacturing Pte, Ltd. Method for preventing titanium lifting during and after metal etching
JP2687948B2 (ja) * 1995-10-05 1997-12-08 日本電気株式会社 半導体装置の製造方法
US5863828A (en) * 1996-09-25 1999-01-26 National Semiconductor Corporation Trench planarization technique
US5994202A (en) * 1997-01-23 1999-11-30 International Business Machines Corporation Threshold voltage tailoring of the corner of a MOSFET device
US5880005A (en) * 1997-10-23 1999-03-09 Taiwan Semiconductor Manufacturing Company, Ltd. Method for forming a tapered profile insulator shape
US6365968B1 (en) 1998-08-07 2002-04-02 Corning Lasertron, Inc. Polyimide/silicon oxide bi-layer for bond pad parasitic capacitance control in semiconductor electro-optical device
AU7743900A (en) * 1999-10-01 2001-05-10 Corning Lasertron, Inc. Method for making a ridge waveguide semiconductor device
US6251747B1 (en) * 1999-11-02 2001-06-26 Philips Semiconductors, Inc. Use of an insulating spacer to prevent threshold voltage roll-off in narrow devices
US6593210B1 (en) * 2000-10-24 2003-07-15 Advanced Micro Devices, Inc. Self-aligned/maskless reverse etch process using an inorganic film
US8017493B2 (en) * 2008-05-12 2011-09-13 Texas Instruments Incorporated Method of planarizing a semiconductor device
JP5679626B2 (ja) * 2008-07-07 2015-03-04 セイコーインスツル株式会社 半導体装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142667A (en) * 1980-03-13 1981-11-07 Ibm Semiconductor device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2629996A1 (de) * 1976-07-03 1978-01-05 Ibm Deutschland Verfahren zur passivierung und planarisierung eines metallisierungsmusters
US4389281A (en) * 1980-12-16 1983-06-21 International Business Machines Corporation Method of planarizing silicon dioxide in semiconductor devices
JPS57204133A (en) * 1981-06-10 1982-12-14 Hitachi Ltd Manufacture of semiconductor integrated circuit
JPS59158534A (ja) * 1983-02-28 1984-09-08 Oki Electric Ind Co Ltd 半導体装置の製造方法
US4519128A (en) * 1983-10-05 1985-05-28 International Business Machines Corporation Method of making a trench isolated device
JPS60120723A (ja) * 1983-11-30 1985-06-28 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 電子装置
US4545852A (en) * 1984-06-20 1985-10-08 Hewlett-Packard Company Planarization of dielectric films on integrated circuits

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142667A (en) * 1980-03-13 1981-11-07 Ibm Semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02183552A (ja) * 1989-01-09 1990-07-18 Nec Corp 集積回路の製造方法
JP2012054615A (ja) * 2007-01-04 2012-03-15 Beijing Boe Optoelectronics Technology Co Ltd Ｔｆｔアレイ構造及びその製造方法

Also Published As

Publication number Publication date
EP0224039B1 (en) 1990-07-11
US4654120A (en) 1987-03-31
JPH0347740B2 (https=) 1991-07-22
EP0224039A3 (en) 1987-12-02
EP0224039A2 (en) 1987-06-03
DE3672570D1 (de) 1990-08-16
CA1267349A (en) 1990-04-03

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