JPS62101677A - 半導体ウエハの保護部材 - Google Patents

半導体ウエハの保護部材

Info

Publication number
JPS62101677A
JPS62101677A JP60243594A JP24359485A JPS62101677A JP S62101677 A JPS62101677 A JP S62101677A JP 60243594 A JP60243594 A JP 60243594A JP 24359485 A JP24359485 A JP 24359485A JP S62101677 A JPS62101677 A JP S62101677A
Authority
JP
Japan
Prior art keywords
pressure
sensitive adhesive
adhesive layer
semiconductor wafer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60243594A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0582868B2 (enExample
Inventor
Takemasa Uemura
植村　剛正
Seishiro Matsuzaki
松崎　征四郎
Yoshinari Satoda
良成 里田
Eiji Shigemura
重村　栄二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Electric Industrial Co Ltd filed Critical Nitto Electric Industrial Co Ltd
Priority to JP60243594A priority Critical patent/JPS62101677A/ja
Publication of JPS62101677A publication Critical patent/JPS62101677A/ja
Publication of JPH0582868B2 publication Critical patent/JPH0582868B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Adhesive Tapes (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP60243594A 1985-10-30 1985-10-30 半導体ウエハの保護部材 Granted JPS62101677A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60243594A JPS62101677A (ja) 1985-10-30 1985-10-30 半導体ウエハの保護部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60243594A JPS62101677A (ja) 1985-10-30 1985-10-30 半導体ウエハの保護部材

Publications (2)

Publication Number Publication Date
JPS62101677A true JPS62101677A (ja) 1987-05-12
JPH0582868B2 JPH0582868B2 (enExample) 1993-11-22

Family

ID=17106137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60243594A Granted JPS62101677A (ja) 1985-10-30 1985-10-30 半導体ウエハの保護部材

Country Status (1)

Country Link
JP (1) JPS62101677A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6235387B1 (en) 1998-03-30 2001-05-22 3M Innovative Properties Company Semiconductor wafer processing tapes
JP2009124059A (ja) * 2007-11-19 2009-06-04 Fuji Electric Device Technology Co Ltd 半導体素子の製造方法
CN105778833A (zh) * 2016-03-21 2016-07-20 苏州华周胶带有限公司 一种用于压敏胶带的压敏胶

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52114632A (en) * 1976-03-22 1977-09-26 Sekisui Chem Co Ltd Pressure sensitive adhesive tape or sheet
JPS57141475A (en) * 1981-02-25 1982-09-01 Nitto Electric Ind Co Ltd Surface-protective adhesive sheet
JPS5998185A (ja) * 1982-11-04 1984-06-06 ミネソタ・マイニング・アンド・マニユフアクチユアリング・コンパニ− 感圧性接着テ−プ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52114632A (en) * 1976-03-22 1977-09-26 Sekisui Chem Co Ltd Pressure sensitive adhesive tape or sheet
JPS57141475A (en) * 1981-02-25 1982-09-01 Nitto Electric Ind Co Ltd Surface-protective adhesive sheet
JPS5998185A (ja) * 1982-11-04 1984-06-06 ミネソタ・マイニング・アンド・マニユフアクチユアリング・コンパニ− 感圧性接着テ−プ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6235387B1 (en) 1998-03-30 2001-05-22 3M Innovative Properties Company Semiconductor wafer processing tapes
US6478918B2 (en) 1998-03-30 2002-11-12 3M Innovative Properties Company Semiconductor wafer processing tapes
JP2009124059A (ja) * 2007-11-19 2009-06-04 Fuji Electric Device Technology Co Ltd 半導体素子の製造方法
CN105778833A (zh) * 2016-03-21 2016-07-20 苏州华周胶带有限公司 一种用于压敏胶带的压敏胶

Also Published As

Publication number Publication date
JPH0582868B2 (enExample) 1993-11-22

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Legal Events

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