JPS6197838U - - Google Patents
Info
- Publication number
- JPS6197838U JPS6197838U JP17887385U JP17887385U JPS6197838U JP S6197838 U JPS6197838 U JP S6197838U JP 17887385 U JP17887385 U JP 17887385U JP 17887385 U JP17887385 U JP 17887385U JP S6197838 U JPS6197838 U JP S6197838U
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- magnification
- recognition device
- images
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 238000007781 pre-processing Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000003708 edge detection Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
Landscapes
- Character Discrimination (AREA)
- Wire Bonding (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Image Input (AREA)
- Image Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985178873U JPH0134345Y2 (enrdf_load_stackoverflow) | 1985-11-20 | 1985-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985178873U JPH0134345Y2 (enrdf_load_stackoverflow) | 1985-11-20 | 1985-11-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6197838U true JPS6197838U (enrdf_load_stackoverflow) | 1986-06-23 |
| JPH0134345Y2 JPH0134345Y2 (enrdf_load_stackoverflow) | 1989-10-19 |
Family
ID=30736439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985178873U Expired JPH0134345Y2 (enrdf_load_stackoverflow) | 1985-11-20 | 1985-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0134345Y2 (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114111A (ja) * | 1988-10-25 | 1990-04-26 | Matsushita Electric Ind Co Ltd | 厚膜印刷パターンの外観検査方法 |
| JPH02120605A (ja) * | 1988-10-31 | 1990-05-08 | Matsushita Electric Ind Co Ltd | 厚膜印刷パターンの外観検査装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS551101A (en) * | 1977-11-10 | 1980-01-07 | Nec Corp | Method and device for detecting position of semiconductor pellet |
-
1985
- 1985-11-20 JP JP1985178873U patent/JPH0134345Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS551101A (en) * | 1977-11-10 | 1980-01-07 | Nec Corp | Method and device for detecting position of semiconductor pellet |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114111A (ja) * | 1988-10-25 | 1990-04-26 | Matsushita Electric Ind Co Ltd | 厚膜印刷パターンの外観検査方法 |
| JPH02120605A (ja) * | 1988-10-31 | 1990-05-08 | Matsushita Electric Ind Co Ltd | 厚膜印刷パターンの外観検査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0134345Y2 (enrdf_load_stackoverflow) | 1989-10-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR920008484A (ko) | 와이어 본딩 검사 장치 | |
| JPS6197838U (enrdf_load_stackoverflow) | ||
| JPH0335108A (ja) | リード位置認識装置 | |
| JPH0281449A (ja) | 球状物の位置検出方法およびその装置 | |
| JP3447538B2 (ja) | パターン検査方法 | |
| JPS62276443A (ja) | 自動穴ミス検査機 | |
| JPH0493752A (ja) | 欠陥・異物検査装置 | |
| JPS63108736A (ja) | ウエハプロ−バ装置 | |
| JPH02247510A (ja) | 外観検査装置 | |
| JPH05108799A (ja) | 配線パターン検査装置 | |
| JPH0142499B2 (enrdf_load_stackoverflow) | ||
| JPH04315905A (ja) | 物体検査装置 | |
| JP3333280B2 (ja) | ボンディングワイヤ検査方法 | |
| Cheng et al. | Binary picture acquisition using unidirectional oblique illumination | |
| JPS6146053B2 (enrdf_load_stackoverflow) | ||
| JPS617404A (ja) | 位置検出装置 | |
| JPH10141930A (ja) | パターン検査方法及びパターン検査装置 | |
| JPH085826Y2 (ja) | Icカード用モジュール基板 | |
| JPS61294831A (ja) | ウエハチツプの検出方法 | |
| JPH0618428A (ja) | 欠陥検査方法及び半導体装置の製造方法 | |
| JPH0467867U (enrdf_load_stackoverflow) | ||
| JPH0240933A (ja) | 半導体チップの位置決め方法 | |
| JP2000249517A (ja) | 実装部品の部品間検査方法およびその装置 | |
| JPS5867033A (ja) | ワイヤボンデイング方法 | |
| JPS6041952U (ja) | 縮小投影露光装置 |