JPS6197838U - - Google Patents
Info
- Publication number
- JPS6197838U JPS6197838U JP17887385U JP17887385U JPS6197838U JP S6197838 U JPS6197838 U JP S6197838U JP 17887385 U JP17887385 U JP 17887385U JP 17887385 U JP17887385 U JP 17887385U JP S6197838 U JPS6197838 U JP S6197838U
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- magnification
- recognition device
- images
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 238000007781 pre-processing Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000003708 edge detection Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
Landscapes
- Image Input (AREA)
- Image Processing (AREA)
- Character Discrimination (AREA)
- Wire Bonding (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985178873U JPH0134345Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-11-20 | 1985-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985178873U JPH0134345Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-11-20 | 1985-11-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6197838U true JPS6197838U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-06-23 |
| JPH0134345Y2 JPH0134345Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-10-19 |
Family
ID=30736439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985178873U Expired JPH0134345Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-11-20 | 1985-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0134345Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114111A (ja) * | 1988-10-25 | 1990-04-26 | Matsushita Electric Ind Co Ltd | 厚膜印刷パターンの外観検査方法 |
| JPH02120605A (ja) * | 1988-10-31 | 1990-05-08 | Matsushita Electric Ind Co Ltd | 厚膜印刷パターンの外観検査装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS551101A (en) * | 1977-11-10 | 1980-01-07 | Nec Corp | Method and device for detecting position of semiconductor pellet |
-
1985
- 1985-11-20 JP JP1985178873U patent/JPH0134345Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS551101A (en) * | 1977-11-10 | 1980-01-07 | Nec Corp | Method and device for detecting position of semiconductor pellet |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114111A (ja) * | 1988-10-25 | 1990-04-26 | Matsushita Electric Ind Co Ltd | 厚膜印刷パターンの外観検査方法 |
| JPH02120605A (ja) * | 1988-10-31 | 1990-05-08 | Matsushita Electric Ind Co Ltd | 厚膜印刷パターンの外観検査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0134345Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-10-19 |
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