JPS6179760A - 活性化反応性イオンプレ−テイングによるアルミニウム酸化物被膜形成法 - Google Patents

活性化反応性イオンプレ−テイングによるアルミニウム酸化物被膜形成法

Info

Publication number
JPS6179760A
JPS6179760A JP20239984A JP20239984A JPS6179760A JP S6179760 A JPS6179760 A JP S6179760A JP 20239984 A JP20239984 A JP 20239984A JP 20239984 A JP20239984 A JP 20239984A JP S6179760 A JPS6179760 A JP S6179760A
Authority
JP
Japan
Prior art keywords
ion plating
aluminum oxide
substrate
oxide film
hard
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20239984A
Other languages
English (en)
Japanese (ja)
Other versions
JPS633021B2 (de
Inventor
Saburo Kuwano
桑野　三郎
Masahiro Sugiyama
杉山　匡宏
Yoshio Shibuya
渋谷　佳男
Terunori Ootake
大竹　輝徳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHIZUOKAKEN
Shizuoka Prefecture
Original Assignee
SHIZUOKAKEN
Shizuoka Prefecture
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHIZUOKAKEN, Shizuoka Prefecture filed Critical SHIZUOKAKEN
Priority to JP20239984A priority Critical patent/JPS6179760A/ja
Publication of JPS6179760A publication Critical patent/JPS6179760A/ja
Publication of JPS633021B2 publication Critical patent/JPS633021B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP20239984A 1984-09-27 1984-09-27 活性化反応性イオンプレ−テイングによるアルミニウム酸化物被膜形成法 Granted JPS6179760A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20239984A JPS6179760A (ja) 1984-09-27 1984-09-27 活性化反応性イオンプレ−テイングによるアルミニウム酸化物被膜形成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20239984A JPS6179760A (ja) 1984-09-27 1984-09-27 活性化反応性イオンプレ−テイングによるアルミニウム酸化物被膜形成法

Publications (2)

Publication Number Publication Date
JPS6179760A true JPS6179760A (ja) 1986-04-23
JPS633021B2 JPS633021B2 (de) 1988-01-21

Family

ID=16456852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20239984A Granted JPS6179760A (ja) 1984-09-27 1984-09-27 活性化反応性イオンプレ−テイングによるアルミニウム酸化物被膜形成法

Country Status (1)

Country Link
JP (1) JPS6179760A (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994021839A1 (en) * 1993-03-15 1994-09-29 Kabushiki Kaisha Kobeseikosho Apparatus and system for arc ion plating
US5879823A (en) * 1995-12-12 1999-03-09 Kennametal Inc. Coated cutting tool
KR100430410B1 (ko) * 2000-08-24 2004-05-04 재단법인 포항산업과학연구원 이온플레이팅에 의한 알루미늄 피막의 제조방법
US20230227646A1 (en) * 2022-01-17 2023-07-20 National Technology & Engineering Solutions Of Sandia, Llc Method of tuning physical properties of thermosets

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5322168A (en) * 1976-08-12 1978-03-01 Tsuneo Nishida Apparatus and process for ionic plating of hottcathode discharge type

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5322168A (en) * 1976-08-12 1978-03-01 Tsuneo Nishida Apparatus and process for ionic plating of hottcathode discharge type

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994021839A1 (en) * 1993-03-15 1994-09-29 Kabushiki Kaisha Kobeseikosho Apparatus and system for arc ion plating
US5879823A (en) * 1995-12-12 1999-03-09 Kennametal Inc. Coated cutting tool
KR100430410B1 (ko) * 2000-08-24 2004-05-04 재단법인 포항산업과학연구원 이온플레이팅에 의한 알루미늄 피막의 제조방법
US20230227646A1 (en) * 2022-01-17 2023-07-20 National Technology & Engineering Solutions Of Sandia, Llc Method of tuning physical properties of thermosets

Also Published As

Publication number Publication date
JPS633021B2 (de) 1988-01-21

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