JPS6167934A - 溝埋込分離の形成方法 - Google Patents

溝埋込分離の形成方法

Info

Publication number
JPS6167934A
JPS6167934A JP59189893A JP18989384A JPS6167934A JP S6167934 A JPS6167934 A JP S6167934A JP 59189893 A JP59189893 A JP 59189893A JP 18989384 A JP18989384 A JP 18989384A JP S6167934 A JPS6167934 A JP S6167934A
Authority
JP
Japan
Prior art keywords
oxide glass
groove
silicon oxide
forming
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59189893A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354860B2 (OSRAM
Inventor
Keimei Mikoshiba
御子柴　啓明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP59189893A priority Critical patent/JPS6167934A/ja
Publication of JPS6167934A publication Critical patent/JPS6167934A/ja
Publication of JPH0354860B2 publication Critical patent/JPH0354860B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/00—
    • H10W10/01—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
JP59189893A 1984-09-11 1984-09-11 溝埋込分離の形成方法 Granted JPS6167934A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59189893A JPS6167934A (ja) 1984-09-11 1984-09-11 溝埋込分離の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59189893A JPS6167934A (ja) 1984-09-11 1984-09-11 溝埋込分離の形成方法

Publications (2)

Publication Number Publication Date
JPS6167934A true JPS6167934A (ja) 1986-04-08
JPH0354860B2 JPH0354860B2 (OSRAM) 1991-08-21

Family

ID=16248944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59189893A Granted JPS6167934A (ja) 1984-09-11 1984-09-11 溝埋込分離の形成方法

Country Status (1)

Country Link
JP (1) JPS6167934A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6246543A (ja) * 1985-08-23 1987-02-28 Nec Corp 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6246543A (ja) * 1985-08-23 1987-02-28 Nec Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0354860B2 (OSRAM) 1991-08-21

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