JPH0354860B2 - - Google Patents

Info

Publication number
JPH0354860B2
JPH0354860B2 JP59189893A JP18989384A JPH0354860B2 JP H0354860 B2 JPH0354860 B2 JP H0354860B2 JP 59189893 A JP59189893 A JP 59189893A JP 18989384 A JP18989384 A JP 18989384A JP H0354860 B2 JPH0354860 B2 JP H0354860B2
Authority
JP
Japan
Prior art keywords
silicon oxide
oxide glass
forming
groove
trench
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59189893A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6167934A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP59189893A priority Critical patent/JPS6167934A/ja
Publication of JPS6167934A publication Critical patent/JPS6167934A/ja
Publication of JPH0354860B2 publication Critical patent/JPH0354860B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/00—
    • H10W10/01—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
JP59189893A 1984-09-11 1984-09-11 溝埋込分離の形成方法 Granted JPS6167934A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59189893A JPS6167934A (ja) 1984-09-11 1984-09-11 溝埋込分離の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59189893A JPS6167934A (ja) 1984-09-11 1984-09-11 溝埋込分離の形成方法

Publications (2)

Publication Number Publication Date
JPS6167934A JPS6167934A (ja) 1986-04-08
JPH0354860B2 true JPH0354860B2 (OSRAM) 1991-08-21

Family

ID=16248944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59189893A Granted JPS6167934A (ja) 1984-09-11 1984-09-11 溝埋込分離の形成方法

Country Status (1)

Country Link
JP (1) JPS6167934A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6246543A (ja) * 1985-08-23 1987-02-28 Nec Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6167934A (ja) 1986-04-08

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