JPS6165457A - 半導体装置の多層配線構造 - Google Patents

半導体装置の多層配線構造

Info

Publication number
JPS6165457A
JPS6165457A JP18639184A JP18639184A JPS6165457A JP S6165457 A JPS6165457 A JP S6165457A JP 18639184 A JP18639184 A JP 18639184A JP 18639184 A JP18639184 A JP 18639184A JP S6165457 A JPS6165457 A JP S6165457A
Authority
JP
Japan
Prior art keywords
multilayer wiring
film
conductor layer
wiring structure
organic resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18639184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0330991B2 (enrdf_load_stackoverflow
Inventor
Mitsuru Hirao
充 平尾
Shunichi Numata
俊一 沼田
Yasuhiro Mochizuki
康弘 望月
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd, Hitachi Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP18639184A priority Critical patent/JPS6165457A/ja
Publication of JPS6165457A publication Critical patent/JPS6165457A/ja
Publication of JPH0330991B2 publication Critical patent/JPH0330991B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP18639184A 1984-09-07 1984-09-07 半導体装置の多層配線構造 Granted JPS6165457A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18639184A JPS6165457A (ja) 1984-09-07 1984-09-07 半導体装置の多層配線構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18639184A JPS6165457A (ja) 1984-09-07 1984-09-07 半導体装置の多層配線構造

Publications (2)

Publication Number Publication Date
JPS6165457A true JPS6165457A (ja) 1986-04-04
JPH0330991B2 JPH0330991B2 (enrdf_load_stackoverflow) 1991-05-01

Family

ID=16187573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18639184A Granted JPS6165457A (ja) 1984-09-07 1984-09-07 半導体装置の多層配線構造

Country Status (1)

Country Link
JP (1) JPS6165457A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979190A (enrdf_load_stackoverflow) * 1972-12-04 1974-07-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979190A (enrdf_load_stackoverflow) * 1972-12-04 1974-07-31

Also Published As

Publication number Publication date
JPH0330991B2 (enrdf_load_stackoverflow) 1991-05-01

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