JPS6160317B2 - - Google Patents

Info

Publication number
JPS6160317B2
JPS6160317B2 JP17459082A JP17459082A JPS6160317B2 JP S6160317 B2 JPS6160317 B2 JP S6160317B2 JP 17459082 A JP17459082 A JP 17459082A JP 17459082 A JP17459082 A JP 17459082A JP S6160317 B2 JPS6160317 B2 JP S6160317B2
Authority
JP
Japan
Prior art keywords
valve body
shaft
link
driving
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17459082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5965685A (ja
Inventor
Fumio Kawahara
Junji Takada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Priority to JP17459082A priority Critical patent/JPS5965685A/ja
Publication of JPS5965685A publication Critical patent/JPS5965685A/ja
Publication of JPS6160317B2 publication Critical patent/JPS6160317B2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/44Mechanical actuating means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanically-Actuated Valves (AREA)
  • Details Of Valves (AREA)
JP17459082A 1982-10-06 1982-10-06 弁体の駆動装置 Granted JPS5965685A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17459082A JPS5965685A (ja) 1982-10-06 1982-10-06 弁体の駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17459082A JPS5965685A (ja) 1982-10-06 1982-10-06 弁体の駆動装置

Publications (2)

Publication Number Publication Date
JPS5965685A JPS5965685A (ja) 1984-04-13
JPS6160317B2 true JPS6160317B2 (ru) 1986-12-20

Family

ID=15981220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17459082A Granted JPS5965685A (ja) 1982-10-06 1982-10-06 弁体の駆動装置

Country Status (1)

Country Link
JP (1) JPS5965685A (ru)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4694006B2 (ja) * 2001-02-09 2011-06-01 キヤノンアネルバ株式会社 ゲートバルブ
JP2008075741A (ja) * 2006-09-21 2008-04-03 Taiho Kogyo Co Ltd バルブアセンブリ
JP2009144699A (ja) 2007-12-14 2009-07-02 Hyundai Motor Co Ltd 車エンジン用インパルスチャージャー
CH700100B1 (de) * 2008-12-12 2013-02-28 Inficon Gmbh Ventil.

Also Published As

Publication number Publication date
JPS5965685A (ja) 1984-04-13

Similar Documents

Publication Publication Date Title
US6089537A (en) Pendulum valve assembly
JP4875697B2 (ja) プラズマリアクタチャンバのためのoリングレスタンデムスロットル弁
US20040159354A1 (en) Applications for closed-loop motor control
JP2009511248A (ja) ターボポンプを使用する広範囲圧力制御
JP2682904B2 (ja) スリット・バルブ装置と方法
JP3390708B2 (ja) 広帯域可変コンダクタンスバルブ
JP2004502105A5 (ru)
TW202142797A (zh) 鐘擺閥
JPS6160317B2 (ru)
JP2011069407A (ja) コンダクタンスバルブ及び真空ポンプ
JP2001343075A (ja) バタフライ弁
US20170067564A1 (en) Valve and semiconductor manufacturing equipment
JPS61218885A (ja) 圧力制御装置
JPS62127576A (ja) 制御バルブ
JPS6313969A (ja) 制御バルブ
JPH0932961A (ja) ゲートバルブおよびそれを用いた半導体製造装置
JP4378756B2 (ja) Ald対応真空流量調整バルブによる成膜操作方法
JPH0241410Y2 (ru)
US20020139949A1 (en) Precision controlled fast valve
JPH088152A (ja) 排気装置
JPS6037139A (ja) ウェ−ハ移送経路におけるゲ−トバルブ機構
JPH0444613Y2 (ru)
JP2764812B2 (ja) レジスト処理装置
JP2568920B2 (ja) 差圧シール装置
KR20070045454A (ko) 반도체 공정 챔버의 압력 조절 장치