JPS6160317B2 - - Google Patents
Info
- Publication number
- JPS6160317B2 JPS6160317B2 JP17459082A JP17459082A JPS6160317B2 JP S6160317 B2 JPS6160317 B2 JP S6160317B2 JP 17459082 A JP17459082 A JP 17459082A JP 17459082 A JP17459082 A JP 17459082A JP S6160317 B2 JPS6160317 B2 JP S6160317B2
- Authority
- JP
- Japan
- Prior art keywords
- valve body
- shaft
- link
- driving
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007423 decrease Effects 0.000 claims description 3
- 239000003566 sealing material Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/44—Mechanical actuating means
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanically-Actuated Valves (AREA)
- Details Of Valves (AREA)
Description
【発明の詳細な説明】
本発明は弁体の駆動装置に関し、特に、真空処
理装置における可変コンダクタンスバルブ等の弁
体の駆動装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a driving device for a valve body, and particularly to a driving device for a valve body such as a variable conductance valve in a vacuum processing apparatus.
半導体、ICその他の電子機器等の製造工程に
おいては、真空あるいは低圧のガス中で処理する
工程が少なくない。その処理工程としては、例え
ば、蒸着、スパツタリング、化学的ガス分解によ
る膜の製造、あるいはドライエツチングなどの工
程が挙げられる。これらの装置では、処理室に特
定ガスを導入し圧力を一定に保持しながら処理す
る。この場合、処理室と真空ポンプの間には、ポ
ンプの排気速度を調節するための可変コンダクタ
ンスバルブが取り付けられている。 In the manufacturing process of semiconductors, ICs, and other electronic devices, many processes are performed in vacuum or low-pressure gas. Examples of the processing steps include vapor deposition, sputtering, film production by chemical gas decomposition, and dry etching. In these devices, a specific gas is introduced into a processing chamber and processing is performed while maintaining a constant pressure. In this case, a variable conductance valve is installed between the processing chamber and the vacuum pump to adjust the pumping speed of the pump.
従来の可変コンダクタンスバルブ等の駆動装置
は、原動回転駆動軸の動きを直接弁体の回転軸の
動きとしている。しかし、この方法では、弁体の
開閉機構を考慮すれば明らかなように、原動回転
駆動軸の回転率とコンダクタンスの変化率との関
係が比例しなかつた。このため、可変コンダクタ
ンスバルブを自動制御する場合や原動回転駆動軸
の回転角度でコンダクタンスを制御する場合に、
非常に不便である。更に、従来の駆動装置では、
弁体の閉近辺領域での原動回転駆動軸の回転率に
対するコンダクタンスの変化率が大きいため、弁
体の閉近辺領域でのコンダクタンスの微調節が困
難であつた。 In conventional drive devices such as variable conductance valves, the movement of the driving rotational drive shaft is directly the movement of the rotational shaft of the valve body. However, in this method, as is clear from consideration of the opening/closing mechanism of the valve body, the relationship between the rotation rate of the driving rotary drive shaft and the rate of change in conductance is not proportional. For this reason, when automatically controlling a variable conductance valve or controlling conductance by the rotation angle of the driving rotary drive shaft,
Very inconvenient. Furthermore, in conventional drive devices,
Since the rate of change in conductance with respect to the rotation rate of the driving shaft in the region near the closing of the valve body is large, it has been difficult to finely adjust the conductance in the region near the closing of the valve body.
本発明の目的は、弁体を自動制御する場合や原
動回転駆動軸の回転角度でコンダクタンスを制御
する場合に、最適な弁体の駆動装置を提供するこ
とにある。 An object of the present invention is to provide an optimal valve body driving device when automatically controlling a valve body or when controlling conductance by the rotation angle of a driving rotary drive shaft.
本発明の別の目的は、弁体の閉近辺領域でのコ
ンダクタンスの微調節を容易に行なうことができ
る弁体の駆動装置を提供することにある。 Another object of the present invention is to provide a valve body driving device that can easily finely adjust the conductance in a region near the closing of the valve body.
本発明によれば、弁体の回転軸に原動回転駆動
軸を連結するための装置において、前記原動回転
駆動軸に一端が固定される第１のリンクと、該第
１のリンクの他端に一端が回転自在に取り付けら
れた第２のリンクと、該第２のリンクの他端に一
端が回転自在に取り付けられ、他端が前記弁体の
回転軸に固定された第３のリンクとを有し、前記
第１、前記第２、及び前記第３のリンクの長さ
は、前記弁体を閉じる方向に前記原動回転駆動軸
を回転させるにつれて、該原動回転駆動軸の回転
角に対する前記弁体の回転軸の回転角の比率が連
続的に減少するように選択されていることを特徴
とする弁体の駆動装置が得られる。 According to the present invention, in a device for connecting a driving rotational drive shaft to a rotational shaft of a valve body, a first link having one end fixed to the driving rotational driving shaft; a second link whose one end is rotatably attached; and a third link whose one end is rotatably attached to the other end of the second link and whose other end is fixed to the rotation shaft of the valve body. and the lengths of the first, second, and third links are such that the lengths of the first, second, and third links vary with respect to the rotation angle of the driving rotational drive shaft as the driving rotational drive shaft is rotated in a direction that closes the valve body. A driving device for a valve body is obtained, characterized in that the ratio of the rotation angle of the rotation axis of the body is selected so as to decrease continuously.
次に本発明の実施例について図面を参照して説
明する。 Next, embodiments of the present invention will be described with reference to the drawings.
第１図を参照すると、本発明の一実施例は、真
空処理装置における可変コンダクタンスバルブの
弁体９の駆動装置である。第１図の可変コンダク
タンスバルブの状態は、弁体９の全開時を示して
いる。 Referring to FIG. 1, one embodiment of the present invention is a driving device for a valve body 9 of a variable conductance valve in a vacuum processing apparatus. The state of the variable conductance valve in FIG. 1 shows when the valve body 9 is fully open.
まず、可変コンダクタンスバルブについて説明
する。従軸６は、弁箱７に対する真空シールする
ための弾性シール材８を介して、弁体９に固定さ
れている。弁体９の外周には、弾性シール材１０
が装着されており、弁体９の全閉時の弁箱７に対
する真空シールを行なつている。 First, the variable conductance valve will be explained. The slave shaft 6 is fixed to the valve body 9 via an elastic sealing material 8 for vacuum sealing the valve body 7 . An elastic sealing material 10 is provided around the outer periphery of the valve body 9.
is installed to vacuum seal the valve body 7 when the valve body 9 is fully closed.
次に、第２図をも参照して弁体９の駆動装置を
説明する。なお、第２図も、第１図と同様に、弁
体９の全開時を示している。そして、第２図の２
点鎖線部は弁体９の全閉時のリンク位置を示した
ものである。１は原動回転駆動軸であり、これは
リンク２の一端に固定されている。リンク２の他
端は軸３を介してリンク４の一端に回転自在に取
り付けられている。また、リンク４の他端も軸３
を介してリンク５の一端に回転自在に取り付けら
れている。リンク５の他端は従軸６に固定されて
いる。 Next, the driving device for the valve body 9 will be explained with reference also to FIG. Note that, like FIG. 1, FIG. 2 also shows the valve body 9 when it is fully open. And 2 in Figure 2
The dashed dotted line indicates the link position when the valve body 9 is fully closed. Reference numeral 1 denotes a driving rotational drive shaft, which is fixed to one end of the link 2. The other end of the link 2 is rotatably attached to one end of the link 4 via a shaft 3. Also, the other end of the link 4 is also connected to the shaft 3.
It is rotatably attached to one end of the link 5 via. The other end of the link 5 is fixed to the slave shaft 6.
このように、本実施例の弁体の駆動装置は、弁
体９の回転軸（即ち従軸）６と原動回転駆動軸１
とを、２個の回り対偶を連結するリンク装置（即
ち、リンク２，４，５を有する装置）で連結した
ものである。そして、本実施例では、３つのリン
ク２，４、及び５は、弁体９の全開状態（第２図
の実線位置の状態）から、弁体９を閉じる方向
（矢印Ａの方向）に原動回転駆動軸１を回転させ
るにつれて、原動回転駆動軸１の回転角に対する
弁体９の回転軸６の回転角の比率が連続的に減少
するように選択されている。 In this way, the valve body drive device of this embodiment has the rotation shaft (i.e., slave shaft) 6 of the valve body 9 and the driving rotation drive shaft 1.
These are connected by a link device (that is, a device having links 2, 4, and 5) that connects two rotating pairs. In this embodiment, the three links 2, 4, and 5 move the valve body 9 from its fully open state (solid line position in FIG. 2) in the direction of closing the valve body 9 (in the direction of arrow A). The ratio of the rotation angle of the rotation shaft 6 of the valve body 9 to the rotation angle of the driving rotation drive shaft 1 is selected so as to continuously decrease as the rotation drive shaft 1 is rotated.
第３図に、上述した従来の駆動装置を用いた場
合と、第１図及び第２図の実施例の駆動装置を用
いた場合の、原動回転駆動軸の回転率（弁体９の
全開位置を100とする）とコンダクタンスの変化
率（弁体９の全開時のコンダクタンスを100とす
る）との関係を示した。この図から明らかなよう
に、本実施例の駆動装置を用いれば、原動回転駆
動軸の回転率とコンダクタンスの変化率は直線状
特性を示すので、弁体を自動制御することや原動
回転駆動軸の回転角度でコンダクタンスを制御す
ることを極めて容易にかつ正確に行なうことが可
能となる。また、上述した従来の駆動装置を用い
た場合には、弁体の閉近辺領域での原動回転駆動
軸の回転率に対するコンダクタンスの変化率が大
きいため、弁体の閉近辺領域でのコンダクタンス
の微調節が困難であつたが、本実施例の駆動装置
を用いれば、比較的、弁体の閉近辺領域での原動
回転駆動軸の回転率に対するコンダクタンスの変
化率が小さくなるため、弁体の閉近辺領域でのコ
ンダクタンスの微調節が容易になる。 FIG. 3 shows the rotation rate of the driving shaft (the fully open position of the valve body 9) when using the conventional drive device described above and when using the drive device of the embodiment shown in FIGS. 1 and 2. is 100) and the rate of change in conductance (the conductance when the valve body 9 is fully open is 100). As is clear from this figure, if the drive device of this embodiment is used, the rotation rate of the driving rotary drive shaft and the rate of change in conductance exhibit linear characteristics, so it is possible to automatically control the valve body and It becomes possible to control the conductance extremely easily and accurately at the rotation angle of . In addition, when using the conventional drive device described above, the rate of change in conductance with respect to the rotation rate of the driving rotational drive shaft is large in the region where the valve body is close to closing, so the conductance is small in the region where the valve body is close to closing. Although adjustment was difficult, if the drive device of this embodiment is used, the rate of change in conductance with respect to the rotation rate of the driving rotary drive shaft in the region near the closing of the valve body becomes relatively small, so that the closing of the valve body becomes easier. Fine adjustment of conductance in the nearby region becomes easy.
以上説明したように、本発明によれば、弁体を
自動制御する場合や原動回転駆動軸の回転角度で
コンダクタンスを制御する場合に、最適な弁体の
駆動装置が得られる。更に、本発明によれば、弁
体の閉近辺領域でのコンダクタンスの微調整を容
易に行なうことができる弁体の駆動装置が得られ
る。 As described above, according to the present invention, an optimal valve body driving device can be obtained when the valve body is automatically controlled or when the conductance is controlled by the rotation angle of the driving rotary drive shaft. Further, according to the present invention, there is provided a valve body driving device that can easily finely adjust the conductance in a region near the closing of the valve body.
第１図は本発明の一実施例による弁体の駆動装
置を示した正面図、第２図は第１図を下側から見
た図、第３図は従来品と本発明実施品の原動回転
駆動軸の回転率とコンダクタンスの変化率との関
係を示した図である。
１……原動回転駆動軸、２，４，５……リン
ク、３……軸、６……従軸、７……弁箱、８，１
０……弾性シール材、９……弁体。
FIG. 1 is a front view showing a valve body driving device according to an embodiment of the present invention, FIG. 2 is a view of FIG. 1 viewed from below, and FIG. FIG. 3 is a diagram showing the relationship between the rotation rate of the rotary drive shaft and the rate of change in conductance. 1...Motive rotation drive shaft, 2, 4, 5...Link, 3...Shaft, 6...Slave shaft, 7...Valve box, 8, 1
0...Elastic sealing material, 9...Valve body.
Claims (1)
めの装置において、前記原動回転駆動軸に一端が
固定される第１のリンクと、該第１のリンクの他
端に一端が回転自在に取り付けられた第２のリン
クと、該第２のリンクの他端に一端が回転自在に
取り付けられ、他端が前記弁体の回転軸に固定さ
れた第３のリンクとを有し、前記第１、前記第
２、及び前記第３のリンクの長さは、前記弁体を
閉じる方向に前記原動回転駆動軸を回転させるに
つれて、該原動回転駆動軸の回転角に対する前記
弁体の回転軸の回転角の比率が連続的に減少する
ように選択されていることを特徴とする弁体の駆
動装置。1. A device for connecting a driving rotational drive shaft to the rotational shaft of a valve body, including a first link having one end fixed to the driving rotational driving shaft, and one end rotatably attached to the other end of the first link. a third link having one end rotatably attached to the other end of the second link and a third link having the other end fixed to the rotation shaft of the valve body; 1. The lengths of the second and third links are determined by the length of the rotation axis of the valve body relative to the rotation angle of the drive rotation drive shaft as the drive rotation drive shaft is rotated in the direction of closing the valve body. A driving device for a valve body, characterized in that the ratio of rotation angles is selected such that it continuously decreases.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17459082A JPS5965685A (en) | 1982-10-06 | 1982-10-06 | Drive device for valve element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17459082A JPS5965685A (en) | 1982-10-06 | 1982-10-06 | Drive device for valve element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5965685A JPS5965685A (en) | 1984-04-13 |
| JPS6160317B2 true JPS6160317B2 (en) | 1986-12-20 |
Family
ID=15981220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17459082A Granted JPS5965685A (en) | 1982-10-06 | 1982-10-06 | Drive device for valve element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5965685A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4694006B2 (en) * | 2001-02-09 | 2011-06-01 | キヤノンアネルバ株式会社 | Gate valve |
| JP2008075741A (en) * | 2006-09-21 | 2008-04-03 | Taiho Kogyo Co Ltd | Valve assembly |
| JP2009144699A (en) | 2007-12-14 | 2009-07-02 | Hyundai Motor Co Ltd | Impulse charger for vehicle engine |
| CH700100B1 (en) * | 2008-12-12 | 2013-02-28 | Inficon Gmbh | Valve. |
-
1982
- 1982-10-06 JP JP17459082A patent/JPS5965685A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5965685A (en) | 1984-04-13 |
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