JPS6159850A - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS6159850A
JPS6159850A JP59180509A JP18050984A JPS6159850A JP S6159850 A JPS6159850 A JP S6159850A JP 59180509 A JP59180509 A JP 59180509A JP 18050984 A JP18050984 A JP 18050984A JP S6159850 A JPS6159850 A JP S6159850A
Authority
JP
Japan
Prior art keywords
electromagnet
clip
sample
yoke
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59180509A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0580827B2 (https=
Inventor
Yutaka Kakehi
掛樋　豊
Akira Ichihashi
市橋　晃
Sosuke Kawashima
川島　壮介
Toshiaki Makino
俊昭 牧野
Hideki Izumi
泉　英樹
Ryokichi Tanji
鍜治　亮吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59180509A priority Critical patent/JPS6159850A/ja
Priority to US06/768,332 priority patent/US4718681A/en
Priority to KR1019850006217A priority patent/KR900005351B1/ko
Publication of JPS6159850A publication Critical patent/JPS6159850A/ja
Publication of JPH0580827B2 publication Critical patent/JPH0580827B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Gripping On Spindles (AREA)
JP59180509A 1984-08-31 1984-08-31 半導体製造装置 Granted JPS6159850A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59180509A JPS6159850A (ja) 1984-08-31 1984-08-31 半導体製造装置
US06/768,332 US4718681A (en) 1984-08-31 1985-08-22 Sample chucking apparatus
KR1019850006217A KR900005351B1 (ko) 1984-08-31 1985-08-28 시료 척킹(Chucking) 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59180509A JPS6159850A (ja) 1984-08-31 1984-08-31 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS6159850A true JPS6159850A (ja) 1986-03-27
JPH0580827B2 JPH0580827B2 (https=) 1993-11-10

Family

ID=16084487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59180509A Granted JPS6159850A (ja) 1984-08-31 1984-08-31 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS6159850A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021077850A (ja) * 2019-11-11 2021-05-20 饒梦華 半導体の洗浄設備
CN115816118A (zh) * 2022-10-25 2023-03-21 杭州大和热磁电子有限公司 一种轴类零件辅助加工装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5349762A (en) * 1976-10-19 1978-05-06 Yoshimitsu Ogura Automatic centripetal holding apparatus for industrial robot
JPS5875844A (ja) * 1981-10-30 1983-05-07 Hitachi Ltd ウエハ・ハンドリング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5349762A (en) * 1976-10-19 1978-05-06 Yoshimitsu Ogura Automatic centripetal holding apparatus for industrial robot
JPS5875844A (ja) * 1981-10-30 1983-05-07 Hitachi Ltd ウエハ・ハンドリング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021077850A (ja) * 2019-11-11 2021-05-20 饒梦華 半導体の洗浄設備
CN115816118A (zh) * 2022-10-25 2023-03-21 杭州大和热磁电子有限公司 一种轴类零件辅助加工装置

Also Published As

Publication number Publication date
JPH0580827B2 (https=) 1993-11-10

Similar Documents

Publication Publication Date Title
JP4436973B2 (ja) ポートドアへのポッドドア保持システム
EP0570967A1 (en) Vacuum processing system
JPH07115120A (ja) 基板搬送装置およびその方法
JPS6159850A (ja) 半導体製造装置
JPS6169966A (ja) 真空処理装置
KR900005351B1 (ko) 시료 척킹(Chucking) 장치
TW518649B (en) Substrate container with non-friction door element
JP2003007797A (ja) 真空処理装置
JPH0479932B2 (https=)
JP3347812B2 (ja) 真空容器並びに該真空容器を用いた真空処理方法
JPH08125003A (ja) 挟込み式基板搬送アーム
JPS61136754A (ja) 試料チヤツキング装置
JPH08195426A (ja) 真空搬送用インターフェイス装置
JPS6258654A (ja) 半導体製造装置
JP3182496B2 (ja) 真空ロード・アンロード方法および真空ゲートバルブならびに真空搬送容器
JPH04282848A (ja) 半導体装置の製造装置
JPH04302454A (ja) 半導体製造装置
JPS59182046A (ja) 真空中における搬送装置
JP2001217295A (ja) 半導体製造装置
JP2533708Y2 (ja) 処理チューブの開閉装置
JPS60160139A (ja) 移送方法
EP0384524A2 (en) Wafer transfer system
JPH098115A (ja) 真空搬送容器
JPS6118145A (ja) 運動導入器
JPH11185685A (ja) 真空チャンバーのゲートバルブ