JPS6156875B2 - - Google Patents
Info
- Publication number
- JPS6156875B2 JPS6156875B2 JP54163121A JP16312179A JPS6156875B2 JP S6156875 B2 JPS6156875 B2 JP S6156875B2 JP 54163121 A JP54163121 A JP 54163121A JP 16312179 A JP16312179 A JP 16312179A JP S6156875 B2 JPS6156875 B2 JP S6156875B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- deposited
- substrate
- forming
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16312179A JPS5683087A (en) | 1979-12-11 | 1979-12-11 | Manufacture of josephson element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16312179A JPS5683087A (en) | 1979-12-11 | 1979-12-11 | Manufacture of josephson element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5683087A JPS5683087A (en) | 1981-07-07 |
| JPS6156875B2 true JPS6156875B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-12-04 |
Family
ID=15767570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16312179A Granted JPS5683087A (en) | 1979-12-11 | 1979-12-11 | Manufacture of josephson element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5683087A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55146987A (en) * | 1979-05-07 | 1980-11-15 | Fujitsu Ltd | Manufacture of tunnel junction type josephson element |
-
1979
- 1979-12-11 JP JP16312179A patent/JPS5683087A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5683087A (en) | 1981-07-07 |