JPS6155930A - 工程間リ−ドフレ−ム搬送装置 - Google Patents

工程間リ−ドフレ−ム搬送装置

Info

Publication number
JPS6155930A
JPS6155930A JP17875984A JP17875984A JPS6155930A JP S6155930 A JPS6155930 A JP S6155930A JP 17875984 A JP17875984 A JP 17875984A JP 17875984 A JP17875984 A JP 17875984A JP S6155930 A JPS6155930 A JP S6155930A
Authority
JP
Japan
Prior art keywords
lead frame
lead
inspection
frame
processing steps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17875984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH032341B2 (enrdf_load_stackoverflow
Inventor
Hitoshi Fujimoto
藤本　仁士
Toshinobu Banjo
番條　敏信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP17875984A priority Critical patent/JPS6155930A/ja
Publication of JPS6155930A publication Critical patent/JPS6155930A/ja
Publication of JPH032341B2 publication Critical patent/JPH032341B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Lead Frames For Integrated Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP17875984A 1984-08-27 1984-08-27 工程間リ−ドフレ−ム搬送装置 Granted JPS6155930A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17875984A JPS6155930A (ja) 1984-08-27 1984-08-27 工程間リ−ドフレ−ム搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17875984A JPS6155930A (ja) 1984-08-27 1984-08-27 工程間リ−ドフレ−ム搬送装置

Publications (2)

Publication Number Publication Date
JPS6155930A true JPS6155930A (ja) 1986-03-20
JPH032341B2 JPH032341B2 (enrdf_load_stackoverflow) 1991-01-14

Family

ID=16054102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17875984A Granted JPS6155930A (ja) 1984-08-27 1984-08-27 工程間リ−ドフレ−ム搬送装置

Country Status (1)

Country Link
JP (1) JPS6155930A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01108729A (ja) * 1987-10-21 1989-04-26 Mitsubishi Electric Corp 半導体アセンブリ製造装置
JPH01199437A (ja) * 1988-02-04 1989-08-10 Sanyo Electric Co Ltd 半導体製造装置
WO2006093120A1 (ja) * 2005-03-01 2006-09-08 Tokyo Electron Limited 中継ステーション及び中継ステーションを用いた基板処理システム
ITUD20090156A1 (it) * 2009-09-03 2011-03-04 Applied Materials Inc Apparato di lavorazione substrati comprendente un dispositivo per la manipolazione di substrati danneggiati

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01108729A (ja) * 1987-10-21 1989-04-26 Mitsubishi Electric Corp 半導体アセンブリ製造装置
JPH01199437A (ja) * 1988-02-04 1989-08-10 Sanyo Electric Co Ltd 半導体製造装置
WO2006093120A1 (ja) * 2005-03-01 2006-09-08 Tokyo Electron Limited 中継ステーション及び中継ステーションを用いた基板処理システム
KR100840959B1 (ko) 2005-03-01 2008-06-24 도쿄엘렉트론가부시키가이샤 중계 스테이션 및 중계 스테이션을 이용한 기판 처리시스템
ITUD20090156A1 (it) * 2009-09-03 2011-03-04 Applied Materials Inc Apparato di lavorazione substrati comprendente un dispositivo per la manipolazione di substrati danneggiati

Also Published As

Publication number Publication date
JPH032341B2 (enrdf_load_stackoverflow) 1991-01-14

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