JPS6155930A - 工程間リ−ドフレ−ム搬送装置 - Google Patents
工程間リ−ドフレ−ム搬送装置Info
- Publication number
- JPS6155930A JPS6155930A JP17875984A JP17875984A JPS6155930A JP S6155930 A JPS6155930 A JP S6155930A JP 17875984 A JP17875984 A JP 17875984A JP 17875984 A JP17875984 A JP 17875984A JP S6155930 A JPS6155930 A JP S6155930A
- Authority
- JP
- Japan
- Prior art keywords
- lead frame
- lead
- inspection
- frame
- processing steps
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 37
- 238000007689 inspection Methods 0.000 claims abstract description 23
- 230000002950 deficient Effects 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims description 35
- 230000007723 transport mechanism Effects 0.000 claims description 7
- 238000003384 imaging method Methods 0.000 claims description 3
- 238000007781 pre-processing Methods 0.000 claims 1
- 238000000465 moulding Methods 0.000 abstract description 7
- 239000000047 product Substances 0.000 description 11
- 239000011265 semifinished product Substances 0.000 description 8
- 230000032258 transport Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 201000010099 disease Diseases 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Lead Frames For Integrated Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17875984A JPS6155930A (ja) | 1984-08-27 | 1984-08-27 | 工程間リ−ドフレ−ム搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17875984A JPS6155930A (ja) | 1984-08-27 | 1984-08-27 | 工程間リ−ドフレ−ム搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6155930A true JPS6155930A (ja) | 1986-03-20 |
| JPH032341B2 JPH032341B2 (enrdf_load_stackoverflow) | 1991-01-14 |
Family
ID=16054102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17875984A Granted JPS6155930A (ja) | 1984-08-27 | 1984-08-27 | 工程間リ−ドフレ−ム搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6155930A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01108729A (ja) * | 1987-10-21 | 1989-04-26 | Mitsubishi Electric Corp | 半導体アセンブリ製造装置 |
| JPH01199437A (ja) * | 1988-02-04 | 1989-08-10 | Sanyo Electric Co Ltd | 半導体製造装置 |
| WO2006093120A1 (ja) * | 2005-03-01 | 2006-09-08 | Tokyo Electron Limited | 中継ステーション及び中継ステーションを用いた基板処理システム |
| ITUD20090156A1 (it) * | 2009-09-03 | 2011-03-04 | Applied Materials Inc | Apparato di lavorazione substrati comprendente un dispositivo per la manipolazione di substrati danneggiati |
-
1984
- 1984-08-27 JP JP17875984A patent/JPS6155930A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01108729A (ja) * | 1987-10-21 | 1989-04-26 | Mitsubishi Electric Corp | 半導体アセンブリ製造装置 |
| JPH01199437A (ja) * | 1988-02-04 | 1989-08-10 | Sanyo Electric Co Ltd | 半導体製造装置 |
| WO2006093120A1 (ja) * | 2005-03-01 | 2006-09-08 | Tokyo Electron Limited | 中継ステーション及び中継ステーションを用いた基板処理システム |
| KR100840959B1 (ko) | 2005-03-01 | 2008-06-24 | 도쿄엘렉트론가부시키가이샤 | 중계 스테이션 및 중계 스테이션을 이용한 기판 처리시스템 |
| ITUD20090156A1 (it) * | 2009-09-03 | 2011-03-04 | Applied Materials Inc | Apparato di lavorazione substrati comprendente un dispositivo per la manipolazione di substrati danneggiati |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH032341B2 (enrdf_load_stackoverflow) | 1991-01-14 |
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