JPS6155930A - Device for transporting lead frame between processing steps - Google Patents

Abstract

PURPOSE:To realize the continuous line of plural processing steps by composing a device for transporting lead frames between processing steps out of a lead frame automatically transporting mechanism, an inspection mechanism, a defectives automatically exhausting mechanism, and a lead frame temporary stock mechanism. CONSTITUTION:The whole device for transporting lead frames between processing steps is composed of a device of the previous step, e.g., a wire bonding device 100, a device for transporting lead frames between processing steps 200, a device of the next step, e.g., a molding device 300, a lead frame automatically transporting mechanism 201, an inspection mechanism 202 and lead frame temporary stock mechanisms 203 and 204. If the result of the inspection in the inspection mechanism 202 shows that the lead frame is non-defective, the lead frame 5 flows as designated by the arrow (A) of real line. In a case of defective, an inspection system generates a signal for demanding exhaust of defectives and the inspection mechanism 202 drops defective lead frame 5 out of a normal transportation path (A) by each block, and sents them to the lead frame temporary stock mechanism 204.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a semiconductor device, particularly a semiconductor integrated circuit device c hereinafter referred to as 1'-ICJ. This invention relates to an inter-process lead frame transport device that transports a lead frame between each process in the assembly process.

[Prior art]

The flow of semi-finished products in the IC assembly process will be explained using an example between a wire bonding machine and a molding machine. The entire process involves making IC chip electrodes and lead frame extraction terminals, and in recent years, these processes themselves have been converted to all-white 9J, and semi-automatic wire bonding equipment and fully automatic molding equipment are used at the entrance. Once the product is set, the next stage of semi-finished products processed by that device will be output at the exit. A large number of input products and process-completed products are stored in a lead frame storage box called a magazine.

By the way, in the past, semi-finished products in the shape of lead frames output from wire bonding equipment were stored in a magazine, the magazine was removed manually, and the semi-finished products in the magazine were manually inspected and defective products were removed. Transporting the magazine to the molding device for the next process and setting the magazine was also done manually.

Conventionally, the transportation of magazines between each device and the inspection process during the process have been done manually, so magazines accumulate between the wire bonding process and the next molding process, creating work-in-progress and slowing down the production process. Dead time occurs. Also, transportation and inspection? Because of this, manual handling work is required, which has the disadvantage of producing defective products due to work errors and incurring labor costs.

[Summary of the Invention] This invention was developed in view of the above points, and it automates the transportation of lead frames between each process device, performs inspection along the way, and removes lead frames as necessary. The present invention provides an inter-process lead frame transport device Ei capable of temporarily stocking frames and capable of continuous continuous operation.

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be sequentially explained for each constituent unit. That is, the inter-process lead frame conveyance device which is an embodiment of the present invention includes (in-lead frame automatic conveyance mechanism, (b) inspection mechanism, (c) defective product automatic discharge mechanism, and) lead frame temporary stock mechanism. It consists of

The first factor (,) is a plan view showing the configuration of the "lead frame automatic transport mechanism", and FIG. 1(b) is a side view thereof.

In this root disease, the rollers (1) are arranged at predetermined intervals, and each roller (1) is directly connected to the Boo! Connect J-(2) to motor (3)
)K through the rubber belt (4), each roller (1) is rotated simultaneously. The lead frame (5) placed on this roller (1) has its bottom surface on both long sides in contact with the roller (1), and as each roller (1) rotates, it is transported to the next process position. . The reason why the opposing rollers (1) are made independent from each other is that even if the width of the lead frame (5) changes, the distance between the opposing rollers (1) can be changed.
It is pressurized so that it can be transported.

FIG. 2(a) is a side sectional view showing the configuration of the "inspection mechanism";
Fig. 2(b) is a cross-sectional view taken along line 1lB-(IB), and Fig. 2(,) corresponds to a cross-sectional view taken at [A-11A@] in Fig. 2(b). 64" (is the same as that shown in FIG. ) Kyottekoro (
1) Raise it above the top surface. When the lead frame (5) is carried in in this state, the lead frame (5)
) stops when its tip hits this stopper (7).

At this time, the roller (1) continues to rotate so that the lead frame (5) does not retreat and stop due to the 9J that hits the stopper (7) K. When the lead frame (5) stops, the upper imaging device (9) is activated and performs automatic inspection to determine whether the semi-finished product is good or defective.If you want to increase the number of inspection points mentioned above, use the stopper (7) ) position IJ
- The object to be inspected can be inspected at any position by moving it forward or backward in the direction of movement of the frame (5). The movement of this stopper (7) is performed by the moving block αQ, but the moving block qO
is configured to move along the guide rod Ql)K and is moved by rotating a screw a2 passing through it with a motor Q.

Next, in no particular order, we will explain the ``lead frame temporary stock mechanism,'' and then explain the entire device.
0 Figure 3 (, ) shows the "temporary stocking mechanism for lead frames".
A side cross-sectional view showing the configuration of
3(a) corresponds to the sectional view taken along the river A-1 [All] in FIG. 3(b). Here again, the conveyance mechanism of the lead frame (5) by the rollers (], )K is the same as that described above. The stock frame Q-yu is provided with time-keeping plates 0υ on the inside that hold both longitudinal ends of the lead frame (5) from below in a comb shape, and the stock frame α is equipped with a vertical drive mechanism. (It is moved up and down by IIK. The roller (1) penetrates the side plate of the stock frame θ and is rotationally driven from the outside via the pulley (2). K, which moves the body 04 up and down, is provided with a cut groove qη in the side plate of the stock frame α→ to avoid the rollers (1).

Now, to stock the lead frame (5) in this stocking mechanism, first, the stocking frame α→ is lowered by the vertical drive mechanism αQ, and the uppermost holding plate αQK transport 1
The lead frame (5) sent at tIt is held. Thereafter, the stock frame 04 is raised at a speed corresponding to the transport speed of the transport mechanism, and the lead frame (5) is sequentially held on the holding plate αQ of each stage. The lead frames (5) stocked in this way are sequentially lowered onto the rollers (1) starting from the lead frame (5) held by the lower holding plate αG by lowering the stock frames 0 and 9 one after another. 〇If you use this kind of "temporary lead frame stocking mechanism", when various processes are continuous and the next process does not require the lead frame (5), That is, for example, if the equipment for the next process breaks down and is temporarily stopped, the lead frames (5) are stocked in this stocking frame α◆ while the equipment for the previous process is continuously operated.

In addition, this stock frame Q4 is a lead frame (5)
It can be removed while stored, and can be used to collect semi-finished products even if the next process equipment is not connected.

FIG. 4 is a system diagram of the entire inter-process lead frame conveying apparatus of this embodiment. Here, the entire apparatus will be explained, as well as K "defective product automatic ejection mechanism". In the figure, (1oo)
is a pre-process, for example, a wire bonding device, (200)
is the inter-process lead frame conveying device of this embodiment (30
0) is the next process, for example, a molding device, and (201
) is a lead frame automatic transport mechanism as shown in Fig. 1, (202) is an inspection mechanism as shown in Fig. 2, and (20
3) and (204) are lead 7 as shown in Figure 3.
This is a frame temporary stock mechanism. If the inspection result in the inspection mechanism (202) is "good", the lead frame (6) flows as indicated by the solid arrow A. If the inspection result is a "defective product", the inspection system generates an electric signal requesting to eject the defective product, and the inspection mechanism (202) moves each block in the direction of movement A of the lead frame (5) by motor drive, etc. move in the direction of the right-angled dot-dash line arrow B, remove the defective lead frame (5) from the normal conveyance path A, stop at the position indicated by the broken line, and remove the defective lead frame V-4 (5) t.
After feeding the 7-frame temporary stock mechanism (ZO4), it returns to the inspection mechanism (202) position, and the lead frame (5) is transferred from the lead frame transport mechanism (201).
The reception is accepted.

In the above explanation, the case of conveying the lead frame between the wire bonding device and the molding device was illustrated, but
The inter-process lead frame conveyance device of this invention fii! ti'
It can be applied to general transportation of semi-finished products in the form of reed frames to be processed between a process step where processing is performed in J-frame units and the next process.

〔Effect of the invention〕

As described in detail above, according to the present invention, it is possible to automatically transport semi-finished products in the form of lead frames between each process, inspect them, eliminate defective products, and even temporarily stock them for adjusting the flow of products. It is possible to realize a continuous through-through line, which has a great effect on improving productivity.

[Brief explanation of drawings]

FIG. 1(a) is a plan view showing the structure of an automatic lead frame transport mechanism in an embodiment of the present invention, FIG. 1(bJ is a side view thereof, and FIG. A side sectional view showing the configuration, FIG. 2(b) is the IIE
This is a sectional view taken along line -■B, and FIG. 2(a) corresponds to the sectional view taken along line 11A-IIA in FIG. 2(b). Figure 3(a)
is a side sectional view showing the structure of the lead frame temporary stock mechanism in this embodiment, and FIG.
B - [[A cross-sectional view taken along line B, 8g3 (a) corresponds to a cross-sectional view taken along line IIIA-IA in Figure 3(b).
The figure is a system diagram of the entire inter-process lead frame conveying device of this embodiment. In the figure, (1) is the roller, (2) is the pulley, and (3)
is a motor, (4) is a rubber belt, (5) is a lead frame, (7) is a stopper, (8) is a stopper upper valve part vJ mechanism, (9) is an imaging device, QO is a stop, a moving block, Q4 is the drive screw, (13 is the motor, α◆ is the frame for the stock, Q[holding plate, Ql is the upper and lower filJ mechanism of the frame, (100) is the front-stage process device, (zoo)fi is the inter-process lead Frame transport device, (300) Vi next stage process equipment, (201) lead frame automatic transport mechanism, (20
2) is an inspection mechanism (203). (204) is a lead 7 frame temporary stock mechanism. Note that the same reference numerals in each figure indicate the same or corresponding parts. Stranger Masuo Oiwa Figure 1 Figure 3 (a) (J)

Claims (1)

[Claims] (1) A lead frame transport mechanism in which rollers supporting the lower portions of both side ends of the lead frame sent out from the pre-processing device are sequentially arranged at a predetermined interval, and transport the lead frame by rotationally driving the rollers; An inspection mechanism that forcibly stops the lead frame with a stopper at an arbitrary position during transportation of the lead frame and inspects the lead frame at the relevant process stage using an imaging device, and when the lead frame is determined to be defective as a result of this inspection. has an automatic defective product ejecting mechanism that removes the lead frame from the regular conveyance route, and a plurality of holding plates that hold the lead frame conveyed by the row of rollers from the lower surface of both ends on the inside of the frame. The lead frames are arranged in rows in a comb shape, and the lead frames are sequentially stocked on each of the holding plates by moving this frame up and down with respect to the row of rollers,
Alternatively, an inter-process lead frame transport device is provided with a lead frame temporary stock mechanism that can sequentially send the lead frames from each of the holding plates to the next-stage process equipment.