JPS6154254B2 - - Google Patents
Info
- Publication number
- JPS6154254B2 JPS6154254B2 JP54084258A JP8425879A JPS6154254B2 JP S6154254 B2 JPS6154254 B2 JP S6154254B2 JP 54084258 A JP54084258 A JP 54084258A JP 8425879 A JP8425879 A JP 8425879A JP S6154254 B2 JPS6154254 B2 JP S6154254B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- silicon nitride
- conductivity type
- region
- nitride film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10W20/01—
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8425879A JPS568849A (en) | 1979-07-03 | 1979-07-03 | Manufacture of semiconductor integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8425879A JPS568849A (en) | 1979-07-03 | 1979-07-03 | Manufacture of semiconductor integrated circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS568849A JPS568849A (en) | 1981-01-29 |
| JPS6154254B2 true JPS6154254B2 (enExample) | 1986-11-21 |
Family
ID=13825421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8425879A Granted JPS568849A (en) | 1979-07-03 | 1979-07-03 | Manufacture of semiconductor integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS568849A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5818965A (ja) * | 1981-07-28 | 1983-02-03 | Toshiba Corp | 半導体装置の製造方法 |
| JP2534508B2 (ja) * | 1987-08-11 | 1996-09-18 | セイコーエプソン株式会社 | 高耐圧ｍｏｓ型半導体装置の製造方法 |
| JP3410495B2 (ja) * | 1992-09-30 | 2003-05-26 | 東レ・ダウコーニング・シリコーン株式会社 | 表面塗布剤 |
-
1979
- 1979-07-03 JP JP8425879A patent/JPS568849A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS568849A (en) | 1981-01-29 |
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