JPS6154253B2 - - Google Patents

Info

Publication number
JPS6154253B2
JPS6154253B2 JP54084257A JP8425779A JPS6154253B2 JP S6154253 B2 JPS6154253 B2 JP S6154253B2 JP 54084257 A JP54084257 A JP 54084257A JP 8425779 A JP8425779 A JP 8425779A JP S6154253 B2 JPS6154253 B2 JP S6154253B2
Authority
JP
Japan
Prior art keywords
silicon nitride
region
nitride film
layer
conductivity type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54084257A
Other languages
English (en)
Japanese (ja)
Other versions
JPS568848A (en
Inventor
Mitsutaka Morimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP8425779A priority Critical patent/JPS568848A/ja
Publication of JPS568848A publication Critical patent/JPS568848A/ja
Publication of JPS6154253B2 publication Critical patent/JPS6154253B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W20/01—

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP8425779A 1979-07-03 1979-07-03 Manufacture of semiconductor integrated circuit Granted JPS568848A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8425779A JPS568848A (en) 1979-07-03 1979-07-03 Manufacture of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8425779A JPS568848A (en) 1979-07-03 1979-07-03 Manufacture of semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS568848A JPS568848A (en) 1981-01-29
JPS6154253B2 true JPS6154253B2 (enExample) 1986-11-21

Family

ID=13825394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8425779A Granted JPS568848A (en) 1979-07-03 1979-07-03 Manufacture of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS568848A (enExample)

Also Published As

Publication number Publication date
JPS568848A (en) 1981-01-29

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