JPS6152984B2 - - Google Patents

Info

Publication number
JPS6152984B2
JPS6152984B2 JP52093782A JP9378277A JPS6152984B2 JP S6152984 B2 JPS6152984 B2 JP S6152984B2 JP 52093782 A JP52093782 A JP 52093782A JP 9378277 A JP9378277 A JP 9378277A JP S6152984 B2 JPS6152984 B2 JP S6152984B2
Authority
JP
Japan
Prior art keywords
film
metal
forming
tungsten film
tungsten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52093782A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5427771A (en
Inventor
Masaharu Yorikane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP9378277A priority Critical patent/JPS5427771A/ja
Publication of JPS5427771A publication Critical patent/JPS5427771A/ja
Publication of JPS6152984B2 publication Critical patent/JPS6152984B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Wiring (AREA)
  • Weting (AREA)
JP9378277A 1977-08-04 1977-08-04 Production of metal patterns Granted JPS5427771A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9378277A JPS5427771A (en) 1977-08-04 1977-08-04 Production of metal patterns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9378277A JPS5427771A (en) 1977-08-04 1977-08-04 Production of metal patterns

Publications (2)

Publication Number Publication Date
JPS5427771A JPS5427771A (en) 1979-03-02
JPS6152984B2 true JPS6152984B2 (enrdf_load_stackoverflow) 1986-11-15

Family

ID=14091975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9378277A Granted JPS5427771A (en) 1977-08-04 1977-08-04 Production of metal patterns

Country Status (1)

Country Link
JP (1) JPS5427771A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57191085A (en) * 1981-05-20 1982-11-24 Mitsubishi Paper Mills Ltd Ordinary paper transfer type pressure sensitive copying paper

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611888A (ja) * 1984-06-14 1986-01-07 Matsushita Electric Ind Co Ltd 冷媒圧縮機

Also Published As

Publication number Publication date
JPS5427771A (en) 1979-03-02

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