JPS6147915A - 反射光学系 - Google Patents

反射光学系

Info

Publication number
JPS6147915A
JPS6147915A JP59169640A JP16964084A JPS6147915A JP S6147915 A JPS6147915 A JP S6147915A JP 59169640 A JP59169640 A JP 59169640A JP 16964084 A JP16964084 A JP 16964084A JP S6147915 A JPS6147915 A JP S6147915A
Authority
JP
Japan
Prior art keywords
mirror
optical system
concave
relay
systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59169640A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525087B2 (enrdf_load_stackoverflow
Inventor
Takamasa Hirose
広瀬　隆昌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59169640A priority Critical patent/JPS6147915A/ja
Priority to US06/764,001 priority patent/US4701035A/en
Publication of JPS6147915A publication Critical patent/JPS6147915A/ja
Publication of JPH0525087B2 publication Critical patent/JPH0525087B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0657—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lenses (AREA)
JP59169640A 1984-08-14 1984-08-14 反射光学系 Granted JPS6147915A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP59169640A JPS6147915A (ja) 1984-08-14 1984-08-14 反射光学系
US06/764,001 US4701035A (en) 1984-08-14 1985-08-09 Reflection optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59169640A JPS6147915A (ja) 1984-08-14 1984-08-14 反射光学系

Publications (2)

Publication Number Publication Date
JPS6147915A true JPS6147915A (ja) 1986-03-08
JPH0525087B2 JPH0525087B2 (enrdf_load_stackoverflow) 1993-04-09

Family

ID=15890235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59169640A Granted JPS6147915A (ja) 1984-08-14 1984-08-14 反射光学系

Country Status (1)

Country Link
JP (1) JPS6147915A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6318626A (ja) * 1986-07-11 1988-01-26 Canon Inc 投影露光装置
US5071240A (en) * 1989-09-14 1991-12-10 Nikon Corporation Reflecting optical imaging apparatus using spherical reflectors and producing an intermediate image
JPH04234722A (ja) * 1990-08-28 1992-08-24 Internatl Business Mach Corp <Ibm> 補償型光学システム
WO2006087978A1 (ja) * 2005-02-15 2006-08-24 Nikon Corporation 投影光学系、露光装置、およびデバイスの製造方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6318626A (ja) * 1986-07-11 1988-01-26 Canon Inc 投影露光装置
US5071240A (en) * 1989-09-14 1991-12-10 Nikon Corporation Reflecting optical imaging apparatus using spherical reflectors and producing an intermediate image
JPH04234722A (ja) * 1990-08-28 1992-08-24 Internatl Business Mach Corp <Ibm> 補償型光学システム
WO2006087978A1 (ja) * 2005-02-15 2006-08-24 Nikon Corporation 投影光学系、露光装置、およびデバイスの製造方法
EP1860477A4 (en) * 2005-02-15 2008-08-20 Nikon Corp OPTICAL PROJECTION SYSTEM, EXPOSURE EQUIPMENT, AND DEVICE MANUFACTURING METHOD
JP5201526B2 (ja) * 2005-02-15 2013-06-05 株式会社ニコン 投影光学系、露光装置、およびデバイスの製造方法
KR101332494B1 (ko) * 2005-02-15 2013-11-26 가부시키가이샤 니콘 투영 광학계, 노광 장치 및 디바이스의 제조 방법

Also Published As

Publication number Publication date
JPH0525087B2 (enrdf_load_stackoverflow) 1993-04-09

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