JPS6147222B2 - - Google Patents
Info
- Publication number
- JPS6147222B2 JPS6147222B2 JP11862882A JP11862882A JPS6147222B2 JP S6147222 B2 JPS6147222 B2 JP S6147222B2 JP 11862882 A JP11862882 A JP 11862882A JP 11862882 A JP11862882 A JP 11862882A JP S6147222 B2 JPS6147222 B2 JP S6147222B2
- Authority
- JP
- Japan
- Prior art keywords
- transfer
- processed
- carrier
- transfer device
- speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010276 construction Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 49
- 238000002360 preparation method Methods 0.000 description 15
- 238000004544 sputter deposition Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 210000000078 claw Anatomy 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11862882A JPS599168A (ja) | 1982-07-09 | 1982-07-09 | 連続真空処理装置用制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11862882A JPS599168A (ja) | 1982-07-09 | 1982-07-09 | 連続真空処理装置用制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS599168A JPS599168A (ja) | 1984-01-18 |
| JPS6147222B2 true JPS6147222B2 (de) | 1986-10-17 |
Family
ID=14741234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11862882A Granted JPS599168A (ja) | 1982-07-09 | 1982-07-09 | 連続真空処理装置用制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS599168A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3756402B2 (ja) * | 2000-12-08 | 2006-03-15 | 富士写真フイルム株式会社 | 基板搬送装置及び方法 |
| JP5856885B2 (ja) * | 2012-03-26 | 2016-02-10 | 長州産業株式会社 | 成膜装置及び成膜装置用基板搬送装置 |
-
1982
- 1982-07-09 JP JP11862882A patent/JPS599168A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS599168A (ja) | 1984-01-18 |
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