JPS6146973B2 - - Google Patents
Info
- Publication number
- JPS6146973B2 JPS6146973B2 JP492277A JP492277A JPS6146973B2 JP S6146973 B2 JPS6146973 B2 JP S6146973B2 JP 492277 A JP492277 A JP 492277A JP 492277 A JP492277 A JP 492277A JP S6146973 B2 JPS6146973 B2 JP S6146973B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- wiring
- forming
- present
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 9
- 239000011347 resin Substances 0.000 claims description 7
- 229920005989 resin Polymers 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000010410 layer Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 150000004984 aromatic diamines Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP492277A JPS5390886A (en) | 1977-01-21 | 1977-01-21 | Wiring structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP492277A JPS5390886A (en) | 1977-01-21 | 1977-01-21 | Wiring structure |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9360585A Division JPS60258937A (ja) | 1985-05-02 | 1985-05-02 | 配線構造体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5390886A JPS5390886A (en) | 1978-08-10 |
| JPS6146973B2 true JPS6146973B2 (US07582779-20090901-C00044.png) | 1986-10-16 |
Family
ID=11597096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP492277A Granted JPS5390886A (en) | 1977-01-21 | 1977-01-21 | Wiring structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5390886A (US07582779-20090901-C00044.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57133674A (en) * | 1981-02-13 | 1982-08-18 | Hitachi Ltd | Structure of multilayer wiring |
| US5266835A (en) * | 1988-02-02 | 1993-11-30 | National Semiconductor Corporation | Semiconductor structure having a barrier layer disposed within openings of a dielectric layer |
-
1977
- 1977-01-21 JP JP492277A patent/JPS5390886A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5390886A (en) | 1978-08-10 |
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