JPS5390886A - Wiring structure - Google Patents
Wiring structureInfo
- Publication number
- JPS5390886A JPS5390886A JP492277A JP492277A JPS5390886A JP S5390886 A JPS5390886 A JP S5390886A JP 492277 A JP492277 A JP 492277A JP 492277 A JP492277 A JP 492277A JP S5390886 A JPS5390886 A JP S5390886A
- Authority
- JP
- Japan
- Prior art keywords
- wiring structure
- connecting parts
- making
- distance
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To reduce the distance between the center and the adjacent connecting parts, by making the connecting aperture contain more than two connecting parts.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP492277A JPS5390886A (en) | 1977-01-21 | 1977-01-21 | Wiring structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP492277A JPS5390886A (en) | 1977-01-21 | 1977-01-21 | Wiring structure |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9360585A Division JPS60258937A (en) | 1985-05-02 | 1985-05-02 | Manufacture of wiring structure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5390886A true JPS5390886A (en) | 1978-08-10 |
JPS6146973B2 JPS6146973B2 (en) | 1986-10-16 |
Family
ID=11597096
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP492277A Granted JPS5390886A (en) | 1977-01-21 | 1977-01-21 | Wiring structure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5390886A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57133674A (en) * | 1981-02-13 | 1982-08-18 | Hitachi Ltd | Structure of multilayer wiring |
US5266835A (en) * | 1988-02-02 | 1993-11-30 | National Semiconductor Corporation | Semiconductor structure having a barrier layer disposed within openings of a dielectric layer |
-
1977
- 1977-01-21 JP JP492277A patent/JPS5390886A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57133674A (en) * | 1981-02-13 | 1982-08-18 | Hitachi Ltd | Structure of multilayer wiring |
US5266835A (en) * | 1988-02-02 | 1993-11-30 | National Semiconductor Corporation | Semiconductor structure having a barrier layer disposed within openings of a dielectric layer |
Also Published As
Publication number | Publication date |
---|---|
JPS6146973B2 (en) | 1986-10-16 |
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