JPS6146055B2 - - Google Patents

Info

Publication number
JPS6146055B2
JPS6146055B2 JP55092104A JP9210480A JPS6146055B2 JP S6146055 B2 JPS6146055 B2 JP S6146055B2 JP 55092104 A JP55092104 A JP 55092104A JP 9210480 A JP9210480 A JP 9210480A JP S6146055 B2 JPS6146055 B2 JP S6146055B2
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
type
layer
silicon layer
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55092104A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5717147A (en
Inventor
Koji Ootsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP9210480A priority Critical patent/JPS5717147A/ja
Publication of JPS5717147A publication Critical patent/JPS5717147A/ja
Publication of JPS6146055B2 publication Critical patent/JPS6146055B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP9210480A 1980-07-04 1980-07-04 Wiring formation Granted JPS5717147A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9210480A JPS5717147A (en) 1980-07-04 1980-07-04 Wiring formation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9210480A JPS5717147A (en) 1980-07-04 1980-07-04 Wiring formation

Publications (2)

Publication Number Publication Date
JPS5717147A JPS5717147A (en) 1982-01-28
JPS6146055B2 true JPS6146055B2 (enExample) 1986-10-11

Family

ID=14045127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9210480A Granted JPS5717147A (en) 1980-07-04 1980-07-04 Wiring formation

Country Status (1)

Country Link
JP (1) JPS5717147A (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5297688A (en) * 1976-02-10 1977-08-16 Nec Corp Semiconductor device
JPS5366189A (en) * 1976-11-26 1978-06-13 Hitachi Ltd Production of complementary type mis semiconductor device

Also Published As

Publication number Publication date
JPS5717147A (en) 1982-01-28

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