JPS6144427Y2 - - Google Patents

Info

Publication number
JPS6144427Y2
JPS6144427Y2 JP1980062941U JP6294180U JPS6144427Y2 JP S6144427 Y2 JPS6144427 Y2 JP S6144427Y2 JP 1980062941 U JP1980062941 U JP 1980062941U JP 6294180 U JP6294180 U JP 6294180U JP S6144427 Y2 JPS6144427 Y2 JP S6144427Y2
Authority
JP
Japan
Prior art keywords
air
air pressure
column
inclination angle
varies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980062941U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56164549U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980062941U priority Critical patent/JPS6144427Y2/ja
Publication of JPS56164549U publication Critical patent/JPS56164549U/ja
Application granted granted Critical
Publication of JPS6144427Y2 publication Critical patent/JPS6144427Y2/ja
Expired legal-status Critical Current

Links

JP1980062941U 1980-05-08 1980-05-08 Expired JPS6144427Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980062941U JPS6144427Y2 (cs) 1980-05-08 1980-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980062941U JPS6144427Y2 (cs) 1980-05-08 1980-05-08

Publications (2)

Publication Number Publication Date
JPS56164549U JPS56164549U (cs) 1981-12-07
JPS6144427Y2 true JPS6144427Y2 (cs) 1986-12-15

Family

ID=29657216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980062941U Expired JPS6144427Y2 (cs) 1980-05-08 1980-05-08

Country Status (1)

Country Link
JP (1) JPS6144427Y2 (cs)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237966U (cs) * 1975-09-10 1977-03-17
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method
JPS5443480A (en) * 1977-09-12 1979-04-06 Hitachi Ltd Mask aligner
JPS5530823A (en) * 1978-08-25 1980-03-04 Nippon Telegr & Teleph Corp <Ntt> Mask-wafer gap setting device

Also Published As

Publication number Publication date
JPS56164549U (cs) 1981-12-07

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