JPS56164549U - - Google Patents

Info

Publication number
JPS56164549U
JPS56164549U JP6294180U JP6294180U JPS56164549U JP S56164549 U JPS56164549 U JP S56164549U JP 6294180 U JP6294180 U JP 6294180U JP 6294180 U JP6294180 U JP 6294180U JP S56164549 U JPS56164549 U JP S56164549U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6294180U
Other languages
Japanese (ja)
Other versions
JPS6144427Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980062941U priority Critical patent/JPS6144427Y2/ja
Publication of JPS56164549U publication Critical patent/JPS56164549U/ja
Application granted granted Critical
Publication of JPS6144427Y2 publication Critical patent/JPS6144427Y2/ja
Expired legal-status Critical Current

Links

JP1980062941U 1980-05-08 1980-05-08 Expired JPS6144427Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980062941U JPS6144427Y2 (cs) 1980-05-08 1980-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980062941U JPS6144427Y2 (cs) 1980-05-08 1980-05-08

Publications (2)

Publication Number Publication Date
JPS56164549U true JPS56164549U (cs) 1981-12-07
JPS6144427Y2 JPS6144427Y2 (cs) 1986-12-15

Family

ID=29657216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980062941U Expired JPS6144427Y2 (cs) 1980-05-08 1980-05-08

Country Status (1)

Country Link
JP (1) JPS6144427Y2 (cs)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237966U (cs) * 1975-09-10 1977-03-17
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method
JPS5443480A (en) * 1977-09-12 1979-04-06 Hitachi Ltd Mask aligner
JPS5530823A (en) * 1978-08-25 1980-03-04 Nippon Telegr & Teleph Corp <Ntt> Mask-wafer gap setting device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237966U (cs) * 1975-09-10 1977-03-17
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method
JPS5443480A (en) * 1977-09-12 1979-04-06 Hitachi Ltd Mask aligner
JPS5530823A (en) * 1978-08-25 1980-03-04 Nippon Telegr & Teleph Corp <Ntt> Mask-wafer gap setting device

Also Published As

Publication number Publication date
JPS6144427Y2 (cs) 1986-12-15

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