JPS6144427Y2 - - Google Patents

Description

[Detailed Description of the Invention] This invention relates to an inclination angle adjusting device that can adjust the inclination of a table in any direction using air pressure.

A tilt angle adjustment device that adjusts the tilt angle of a table in any direction with high precision is applied to, for example, an X-ray transfer device. As shown in Fig. 1, this X-ray transfer device has a gap g of 10 between mask a and wafer b.
It is better to keep the gap g as narrow as possible, but due to variations in the thickness of wafer b and variations in thickness depending on the location of wafer b, it is currently 10 μm ± 1 μm to prevent contact with mask a. 1
It is defined as μm.

In addition, in the case of multiple exposure, wafer b is the same, but mask a is replaced each time, so it is thought that a difference in gap occurs depending on the location of mask a and wafer b, which causes the pattern to blur and the fine pattern to be It is thought that transcription becomes difficult. Therefore, there is a need for an inclination angle adjusting device that can arbitrarily change the inclination angle of the chuck c of the wafer b.

This invention was made in view of the above circumstances, and its purpose is to provide an inclination angle adjustment device that can finely adjust the inclination angle of the table as desired by controlling air pressure. .

This invention will be explained below based on an embodiment shown in the drawings. Reference numeral 1 in FIGS. 2 and 3 indicates a support column, which is held vertically and has a collar-shaped support portion 2 integrally provided at its upper end. A disc-shaped table 3 is fitted into the support portion 2 to cover the upper, side and lower surfaces thereof. and,
Notches 2a and 3a facing each other are provided on the upper surface of the support section 2 and the lower surface of the table 3, which are located on the axis 4 of the support column 1.
A ball 5 made of a steel ball is housed between a and 3a. Therefore, the table 3 is supported by the balls 5 so as to be swingable relative to the support portion 2 so as to be tilted in any direction. Furthermore, an air supply mechanism 6 for supplying air to the lower surface of the support portion 2 is provided at the bottom of the table 3.

This air supply mechanism 6 will be described in detail as follows.
A, 7b, and 7c are air jet nozzle groups that divide the table 3 into three equal parts at 120° intervals. These air jet nozzle groups 7a, 7b, 7c consist of six nozzles 8 facing the lower surface of the support portion 2, and these nozzles 8 are connected to the first, second, and third nozzles by tubes 9a, 9b, 9c. No. 3 air pressure variable mechanism 10a,
10b and 10c. The air jet nozzle groups 7a, 7b, 7c are connected to the first, second, third air pressure variable mechanisms 10a, 10b, 1
The air pressure can be controlled independently by 0c. These first, second, and third air pressure variable mechanisms 10a, 10b, and 10c are constituted by regulators and are connected to a common air supply source (not shown).

Therefore, when adjusting the inclination angle of the table 3, for example, the first air pressure variable mechanism 10a
is held constant and the second and third variable air pressure mechanisms 10b and 10c are moved up and down by the same amount, respectively, and the table 3 at the x ₂ portion relative to x ₁ shown in FIG. Tilt in the vertical direction.
Therefore, the table 3 can be kept horizontal by keeping the air pressure constant by the first, second, and third variable air pressure mechanisms 10a, 10b, and 10c, and the first, second, and third variable air pressure mechanisms Air pressure variable mechanism 10
By arbitrarily varying a, 10b, and 10c, the inclination angle of the table 3 can be adjusted in any direction.

Note that in the above embodiment, table 3 is
Three sets of air jet nozzles 7 divided into three equal parts of 120° each
a, 7b, and 7c are provided, but any number of sets may be used as long as there are three or more sets.
It may be provided on the lower surface of the table 3 so as to eject toward the inner surface of the table 3. Furthermore, the fulcrum of the table 3 is not limited to the ball 5, but may be a triangular pyramid.

As explained above, in this invention, a group of air jet nozzles divided into at least three parts on the periphery around the axis is arranged on either side between the support and the table whose inclination angle changes with the axis as the fulcrum. Since the air pressure supplied to these nozzle groups can be independently varied, the table can be tilted in any direction by selectively controlling the air pressure supplied to the air jetting nozzle groups. The tilt angle can be adjusted with high precision. Moreover, the tilt angle can be set simply by controlling the air pressure, and the operation can be easily performed.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing an example of the use of the inclination angle adjustment device, FIG. 2 is a longitudinal sectional front view showing an embodiment of this invention, and FIG. 3 is a sectional view taken along the line shown in FIG. 2. DESCRIPTION OF SYMBOLS 1... Strut, 3... Table, 6... Air supply mechanism, 7a-7c... Air jet nozzle group, 1
0a to 10c...Air pressure variable mechanism.

Claims (1)

[Scope of utility model registration request] A column, a table that is swingably mounted on the column and whose inclination angle changes in any direction with the axis of the column as a fulcrum, and a table that is installed at the part where the column and table face each other and blows out air. an air supply mechanism that varies the inclination angle of the table by the air pressure; What is claimed is: 1. A tilt angle adjustment device comprising: a group of air jetting nozzles provided in the air; and an air pressure variable mechanism that independently varies the air pressure supplied to the air jetting nozzle group.