JPS6218033Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a mounting device whose posture can be adjusted, and in particular, a mounting device that can finely adjust the posture of a mounting stage on which wafers, etc. are placed in the semiconductor manufacturing process in all directions. Regarding physical equipment.

Generally, in the process of manufacturing semiconductor devices,
The surface of the wafer is irradiated with X-rays or the like through a mask. At this time, the wafer and the mask must face each other, and the gap between them must be kept as narrow as possible. Normally, the gap is 10μm±1
It is μm.

However, this gap may fluctuate due to factors such as variations in wafer thickness and displacement due to mask replacement, resulting in errors. If irradiation with X-rays or the like is performed under conditions with this error, the pattern will be distorted and a situation will occur in which a fine pattern cannot be formed. Therefore, there is a need for a support device that can finely adjust the posture of a table on which a wafer is placed and supported in all directions.

The purpose of the present invention is to provide a workpiece device that can meet this requirement, and its features include supporting the workpiece stand so that it can freely float in all directions, and controlling the posture of the workpiece stand by jetting fluid. The point is that it can be forcibly changed in a desired direction by a biasing force.

Embodiments of the present invention will be described below with reference to the drawings.

In FIGS. 1 to 3 showing an embodiment of the present invention, a main body 1 fixed on a base is formed into a cylindrical shape, and a housing 2 is provided in a hollow portion 1A of the main body 1.
is accommodated. The housing 2 is formed into a cylindrical body having a hollow portion 2A at the center, and a disk-shaped fillet portion 2B is formed protruding from the lower circumference of the housing. This fillet portion 2B is formed by an annular groove 1B recessed in the inner peripheral surface of the hollow portion 1A of the main body 1.
It is inserted inside. The housing 2 is supported so as to be able to move slightly in the horizontal direction by a hydrostatic bearing 3 consisting of a plurality of nozzle groups arranged equiangularly and radially on the inner peripheral surface of the hollow part 1A of the main body 1. A pair of upper and lower hydrostatic pressure bearings 4A and 4B, each consisting of a plurality of nozzle groups, are disposed symmetrically at equiangular positions on the upper and lower surfaces of the annular groove 1B and spray fluid at opposing positions on the upper and lower end surfaces of the fillet portion 2B. It is supported in a floating state in the vertical direction. In addition, on the outer periphery of the fillet portion 2B, there are
A pair of receiving portions 2C are integrally protruded at opposite positions, and the pair of receiving portions 2C are integrally provided.
C passes through a window hole 1C formed at the bottom of the annular groove 1B of the main body 1 and projects outward from the main body 1, respectively. The facing surface of the integral receiving portion 2C in the circumferential direction of the housing 2 directly faces a pair of block bodies 5 fixed to an outer position of the main body 1 on the base in a sandwich-like manner. It receives fluid jets from a pair of nozzles 6 provided on opposing surfaces. Therefore, housing 2
is adapted to be displaced in the circumferential direction by receiving the urging force of the fluid jet from this nozzle. A piston part 7A formed at the lower part of the piston body 7 is inserted into the hollow part 2A of the housing 2, and the piston part 7A is arranged equiangularly and radially on the inner peripheral surface of the hollow part 2A of the housing 2. Its sliding movement is guided by a hydrostatic bearing 8 consisting of a plurality of nozzle groups provided. This piston body 7 is
The piston portion 7A is moved up and down relative to the housing 2 by receiving fluid jet from a nozzle 9 provided on the bottom surface of the hollow portion 2A of the housing 2, facing the bottom surface of the piston portion 7A. A plurality of nozzles 10 are arranged at equiangular positions on the ceiling surface of the hollow part 2A of the housing 2, facing the upper surface.
In response to the fluid jet from the nozzle 9, the nozzle 9 is controlled to stop moving up and down the housing 2. A stage 11 is supported at the upper end of the piston body 7 by accommodating a disk-shaped flange 7B formed on the piston body 7 in a hollow part 11B formed in the stage 11, This stage 11 has a ball 12 interposed on the axis between the ceiling surface of the hollow section 11B and the upper end surface of the flange section 7B.
It is supported so as to be tiltable in the vertical direction with respect to the upper end surface of B. Moreover, this stage 11 has a hollow part 11B.
By injecting fluid from a plurality of nozzles 13 disposed at equiangular positions on the lower surface of the flange portion 7B to opposing positions on the lower surface of the flange portion 7B,
It is forcibly inclined with respect to the flange portion 7B.

The attitude adjustment operation of the stage of the stage of the stage apparatus having the above configuration will be explained.

First, the vertical position of the stage 11 can be adjusted by ejecting fluid from the nozzle 9 to push up the piston body 7, and controlling the pushing up to be stopped by ejecting fluid from the nozzle 10. Next, adjustment of the vertical and horizontal positions of the stage 11 in the horizontal plane is performed by adjusting the housing 2 which is floating while holding the piston body 7, and the hydrostatic bearing 3 which supports the housing 2 in the radial direction. This can be achieved by increasing or decreasing the fluid ejection force of each nozzle of a plurality of nozzle groups in relation to each other. In this case, the stage 11
Although the amount of adjustment is only a minute amount within the range of the clearance between the housing 2 and the main body 1, it is sufficient for the above-mentioned posture adjustment in the relationship between the wafer and the mask. Further, the displacement adjustment in the circumferential direction in the horizontal plane of the stage 11 is achieved by applying a fluid ejection force from a nozzle 6 provided on the block body 5 to the receiving member 2C protruding from the housing 2. This can be done by forcing it and displacing it in an oscillating manner. next,
Adjustment of the tilt displacement of the stage 11 with respect to the horizontal plane is achieved by increasing or decreasing the fluid ejection force of each of the plurality of nozzle groups 13 provided on the stage 11 in relation to each other, so that the lower surface of the flange surface 7B of the piston body 7 is adjusted. This can be done by injecting the

Incidentally, since the adjustment displacements between the main body 1 and the housing 2, between the receiving member 2C and the block body 5, between the housing 2 and the piston body 7, and between the piston body 7 and the stage 11 are performed relative to each other, each nozzle group may be provided on either side between each other. Further, each nozzle may be appropriately arranged at three or more equiangular radial positions, which are the minimum units for determining a plane. The means for tiltably supporting the stage on the piston body is not limited to a ball, and may be, for example, a structure in which a pointed projection is brought into contact with the apex of a conical hole.

As described above, according to the present invention, the attitude of the stage can be adjusted by minute amounts (usually possible in microns) in all directions.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, FIG. 2 is a sectional view taken along the line--in FIG. 1, and FIG. 3 is a sectional view taken along the line--in FIG. 1...Body, 1A...Hollow part, 2...Housing, 2A...Hollow part, 2B...Fillet part, 2
C...Receiving member (protruding member), 3...Static pressure bearing,
4A, 4B...Static pressure bearing, 5...Block body, 6
... Nozzle (third nozzle), 7 ... Piston body, 7A ... Piston part, 7B ... Flange part,
8... Static pressure bearing, 9... Nozzle (second nozzle), 11... Stage, 11B... Hollow part, 12
... Ball, 13 ... Nozzle (first nozzle).

Claims (1)

[Claims for Utility Model Registration] A mounting device characterized by having the following configuration. (b) A stage whose posture is adjusted. (b) A cylindrical piston body that tiltably supports the document table. (c) A plurality of devices are provided equidistantly on one of the document table and the piston body, and are capable of injecting fluid between the document table and the piston body by increasing and decreasing the fluid pressure respectively. A first nozzle that adjusts the amount of inclination of the document table. (d) A cylindrical housing that supports a portion of the piston body with hydrostatic pressure so as to be movable in the axial direction. (E) The piston body is provided on either one of the piston body and the housing, and a fluid is injected between both end surfaces of a part of the piston body and the housing to drive the piston body in the axial direction. A second nozzle that adjusts the vertical position of the table. (F) It has a hollow part for accommodating the housing, and a group of hydrostatic bearings for hydrostatically supporting the housing in a radially freely movable manner is disposed inside the hollow part, and the hydrostatic bearing group supports the housing by the hydrostatic bearing group. A main body that adjusts the vertical and horizontal positions of the document stage along a horizontal plane via a piston body supported by a hydrostatic shaft. (g) a protruding member that protrudes radially from the housing; a block body that sandwiches the protruding member so that the housing can rotate at a predetermined angle in the circumferential direction; and one of the protruding member and the block body. and a third nozzle for adjusting the circumferential position of the document table along the horizontal plane through the housing and the piston body by injecting fluid between the protruding member and the block body. Circumferential position adjustment means.