JPS5712743U - - Google Patents

Info

Publication number
JPS5712743U
JPS5712743U JP8779380U JP8779380U JPS5712743U JP S5712743 U JPS5712743 U JP S5712743U JP 8779380 U JP8779380 U JP 8779380U JP 8779380 U JP8779380 U JP 8779380U JP S5712743 U JPS5712743 U JP S5712743U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8779380U
Other languages
Japanese (ja)
Other versions
JPS6218033Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980087793U priority Critical patent/JPS6218033Y2/ja
Publication of JPS5712743U publication Critical patent/JPS5712743U/ja
Application granted granted Critical
Publication of JPS6218033Y2 publication Critical patent/JPS6218033Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Load-Bearing And Curtain Walls (AREA)
JP1980087793U 1980-06-23 1980-06-23 Expired JPS6218033Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980087793U JPS6218033Y2 (en) 1980-06-23 1980-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980087793U JPS6218033Y2 (en) 1980-06-23 1980-06-23

Publications (2)

Publication Number Publication Date
JPS5712743U true JPS5712743U (en) 1982-01-22
JPS6218033Y2 JPS6218033Y2 (en) 1987-05-09

Family

ID=29449893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980087793U Expired JPS6218033Y2 (en) 1980-06-23 1980-06-23

Country Status (1)

Country Link
JP (1) JPS6218033Y2 (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237966U (en) * 1975-09-10 1977-03-17
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method
JPS52156452U (en) * 1976-05-22 1977-11-28
JPS5381572U (en) * 1976-12-09 1978-07-06
JPS5443480A (en) * 1977-09-12 1979-04-06 Hitachi Ltd Mask aligner
JPS5485678A (en) * 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
JPS5530823A (en) * 1978-08-25 1980-03-04 Nippon Telegr & Teleph Corp <Ntt> Mask-wafer gap setting device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237966U (en) * 1975-09-10 1977-03-17
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method
JPS52156452U (en) * 1976-05-22 1977-11-28
JPS5381572U (en) * 1976-12-09 1978-07-06
JPS5443480A (en) * 1977-09-12 1979-04-06 Hitachi Ltd Mask aligner
JPS5485678A (en) * 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
JPS5530823A (en) * 1978-08-25 1980-03-04 Nippon Telegr & Teleph Corp <Ntt> Mask-wafer gap setting device

Also Published As

Publication number Publication date
JPS6218033Y2 (en) 1987-05-09

Similar Documents

Publication Publication Date Title
FR2475270B1 (en)
FR2475102B1 (en)
FR2473725B1 (en)
FR2475115B1 (en)
FR2473981B1 (en)
FR2474036B1 (en)
FR2474047B1 (en)
FR2474476B1 (en)
FR2474065B1 (en)
FR2473926B1 (en)
FR2474710B2 (en)
FR2474867B1 (en)
FR2485792B1 (en)
FR2473586B1 (en)
FR2473162B3 (en)
FR2474174B1 (en)
FR2475129B1 (en)
FR2472905B1 (en)
FR2473044B1 (en)
FR2475228B1 (en)
JPS56150444U (en)
FR2475110B1 (en)
FR2474460B1 (en)
FR2474827B1 (en)
JPS56123925U (en)