JPS6143868B2 - - Google Patents
Info
- Publication number
- JPS6143868B2 JPS6143868B2 JP52024248A JP2424877A JPS6143868B2 JP S6143868 B2 JPS6143868 B2 JP S6143868B2 JP 52024248 A JP52024248 A JP 52024248A JP 2424877 A JP2424877 A JP 2424877A JP S6143868 B2 JPS6143868 B2 JP S6143868B2
- Authority
- JP
- Japan
- Prior art keywords
- strain
- generating portion
- conversion element
- bridge circuit
- electric conversion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 39
- 239000000758 substrate Substances 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000012535 impurity Substances 0.000 description 15
- 238000012986 modification Methods 0.000 description 10
- 230000004048 modification Effects 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 238000009792 diffusion process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2424877A JPS53109488A (en) | 1977-03-05 | 1977-03-05 | Mechanicalltooelectric converter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2424877A JPS53109488A (en) | 1977-03-05 | 1977-03-05 | Mechanicalltooelectric converter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53109488A JPS53109488A (en) | 1978-09-25 |
| JPS6143868B2 true JPS6143868B2 (enrdf_load_stackoverflow) | 1986-09-30 |
Family
ID=12132935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2424877A Granted JPS53109488A (en) | 1977-03-05 | 1977-03-05 | Mechanicalltooelectric converter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53109488A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0399932U (enrdf_load_stackoverflow) * | 1990-01-26 | 1991-10-18 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2856708A1 (de) * | 1978-12-29 | 1980-07-10 | Siemens Ag | Messanordnung fuer einen druck-messumformer |
| JPS6323371A (ja) * | 1986-07-16 | 1988-01-30 | Nippon Denso Co Ltd | 半導体歪検出器 |
-
1977
- 1977-03-05 JP JP2424877A patent/JPS53109488A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0399932U (enrdf_load_stackoverflow) * | 1990-01-26 | 1991-10-18 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53109488A (en) | 1978-09-25 |
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