JPS6142966A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6142966A
JPS6142966A JP59165229A JP16522984A JPS6142966A JP S6142966 A JPS6142966 A JP S6142966A JP 59165229 A JP59165229 A JP 59165229A JP 16522984 A JP16522984 A JP 16522984A JP S6142966 A JPS6142966 A JP S6142966A
Authority
JP
Japan
Prior art keywords
layer
gate
metal
gaas
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59165229A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217932B2 (enrdf_load_stackoverflow
Inventor
Koji Tomita
孝司 富田
Mitsunori Yoshikawa
吉川　光憲
Yasuhito Nakagawa
中川　泰仁
Tatsuya Yamashita
山下　達哉
Jiyunkou Takagi
高木　▲じゆん▼公
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP59165229A priority Critical patent/JPS6142966A/ja
Publication of JPS6142966A publication Critical patent/JPS6142966A/ja
Publication of JPH0217932B2 publication Critical patent/JPH0217932B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes

Landscapes

  • Junction Field-Effect Transistors (AREA)
JP59165229A 1984-08-07 1984-08-07 半導体装置の製造方法 Granted JPS6142966A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59165229A JPS6142966A (ja) 1984-08-07 1984-08-07 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59165229A JPS6142966A (ja) 1984-08-07 1984-08-07 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6142966A true JPS6142966A (ja) 1986-03-01
JPH0217932B2 JPH0217932B2 (enrdf_load_stackoverflow) 1990-04-24

Family

ID=15808309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59165229A Granted JPS6142966A (ja) 1984-08-07 1984-08-07 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6142966A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0217932B2 (enrdf_load_stackoverflow) 1990-04-24

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