JPS6141114B2 - - Google Patents
Info
- Publication number
- JPS6141114B2 JPS6141114B2 JP57166568A JP16656882A JPS6141114B2 JP S6141114 B2 JPS6141114 B2 JP S6141114B2 JP 57166568 A JP57166568 A JP 57166568A JP 16656882 A JP16656882 A JP 16656882A JP S6141114 B2 JPS6141114 B2 JP S6141114B2
- Authority
- JP
- Japan
- Prior art keywords
- light emitting
- thin film
- emitting device
- film light
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 23
- 239000010408 film Substances 0.000 claims description 14
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical class [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 5
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 4
- 229910000077 silane Inorganic materials 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 229910052787 antimony Inorganic materials 0.000 claims description 2
- 229910052785 arsenic Inorganic materials 0.000 claims description 2
- 238000000354 decomposition reaction Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 229910052698 phosphorus Inorganic materials 0.000 claims 1
- 239000007789 gas Substances 0.000 description 15
- 238000005401 electroluminescence Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 239000012159 carrier gas Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 239000005083 Zinc sulfide Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000000295 emission spectrum Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052984 zinc sulfide Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Luminescent Compositions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57166568A JPS5956478A (ja) | 1982-09-27 | 1982-09-27 | 薄膜発光素子及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57166568A JPS5956478A (ja) | 1982-09-27 | 1982-09-27 | 薄膜発光素子及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5956478A JPS5956478A (ja) | 1984-03-31 |
| JPS6141114B2 true JPS6141114B2 (enExample) | 1986-09-12 |
Family
ID=15833672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57166568A Granted JPS5956478A (ja) | 1982-09-27 | 1982-09-27 | 薄膜発光素子及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5956478A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2167428B (en) * | 1984-11-24 | 1988-08-10 | Matsushita Electric Works Ltd | Photoconverter |
| JP2570321B2 (ja) * | 1987-10-23 | 1997-01-08 | ミノルタ株式会社 | 発光素子およびその製造方法 |
| JP4845390B2 (ja) * | 2005-02-25 | 2011-12-28 | 株式会社マテリアルデザインファクトリ− | 光波長変換膜とそれを含む照明装置 |
-
1982
- 1982-09-27 JP JP57166568A patent/JPS5956478A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5956478A (ja) | 1984-03-31 |
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