JPS6143840B2 - - Google Patents
Info
- Publication number
- JPS6143840B2 JPS6143840B2 JP57105989A JP10598982A JPS6143840B2 JP S6143840 B2 JPS6143840 B2 JP S6143840B2 JP 57105989 A JP57105989 A JP 57105989A JP 10598982 A JP10598982 A JP 10598982A JP S6143840 B2 JPS6143840 B2 JP S6143840B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- thin film
- light
- dielectric layer
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 claims description 22
- 239000010409 thin film Substances 0.000 claims description 19
- 229910021417 amorphous silicon Inorganic materials 0.000 description 18
- 238000010586 diagram Methods 0.000 description 8
- 239000000203 mixture Substances 0.000 description 7
- 230000005684 electric field Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 229930195733 hydrocarbon Natural products 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- 239000008188 pellet Substances 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000005283 ground state Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- -1 Si 3 N 4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57105989A JPS58223293A (ja) | 1982-06-18 | 1982-06-18 | 薄膜ｅｌ素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57105989A JPS58223293A (ja) | 1982-06-18 | 1982-06-18 | 薄膜ｅｌ素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58223293A JPS58223293A (ja) | 1983-12-24 |
| JPS6143840B2 true JPS6143840B2 (enExample) | 1986-09-30 |
Family
ID=14422133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57105989A Granted JPS58223293A (ja) | 1982-06-18 | 1982-06-18 | 薄膜ｅｌ素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58223293A (enExample) |
-
1982
- 1982-06-18 JP JP57105989A patent/JPS58223293A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58223293A (ja) | 1983-12-24 |
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