JPS6141089Y2 - - Google Patents

Info

Publication number
JPS6141089Y2
JPS6141089Y2 JP1981066084U JP6608481U JPS6141089Y2 JP S6141089 Y2 JPS6141089 Y2 JP S6141089Y2 JP 1981066084 U JP1981066084 U JP 1981066084U JP 6608481 U JP6608481 U JP 6608481U JP S6141089 Y2 JPS6141089 Y2 JP S6141089Y2
Authority
JP
Japan
Prior art keywords
metal plate
mask
pattern
metal
setting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981066084U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56172847U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981066084U priority Critical patent/JPS6141089Y2/ja
Publication of JPS56172847U publication Critical patent/JPS56172847U/ja
Application granted granted Critical
Publication of JPS6141089Y2 publication Critical patent/JPS6141089Y2/ja
Expired legal-status Critical Current

Links

JP1981066084U 1981-05-07 1981-05-07 Expired JPS6141089Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981066084U JPS6141089Y2 (enrdf_load_stackoverflow) 1981-05-07 1981-05-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981066084U JPS6141089Y2 (enrdf_load_stackoverflow) 1981-05-07 1981-05-07

Publications (2)

Publication Number Publication Date
JPS56172847U JPS56172847U (enrdf_load_stackoverflow) 1981-12-21
JPS6141089Y2 true JPS6141089Y2 (enrdf_load_stackoverflow) 1986-11-22

Family

ID=29660191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981066084U Expired JPS6141089Y2 (enrdf_load_stackoverflow) 1981-05-07 1981-05-07

Country Status (1)

Country Link
JP (1) JPS6141089Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS56172847U (enrdf_load_stackoverflow) 1981-12-21

Similar Documents

Publication Publication Date Title
US4215194A (en) Method for forming three-dimensional objects from sheet metal
JPS6141089Y2 (enrdf_load_stackoverflow)
TW402753B (en) Mask blank and method of producing mask
TW200521637A (en) Exposure device for printed circuit board responsive to board dimension variation
JPH08305006A (ja) 感光性樹脂版の製造方法
JPH0664337B2 (ja) 半導体集積回路用ホトマスク
JPS6131864B2 (enrdf_load_stackoverflow)
JPS5679428A (en) Working of ultra-fine article
JPS5437579A (en) Chrome plate
JPS5681844A (en) Production of photomask for ic with airflow passage
JPH0132045Y2 (enrdf_load_stackoverflow)
JPS5841739A (ja) 精密な図面をその表面に有するガラス板とその製法
JPH04216553A (ja) 半導体製造用マスク
JPS5841535Y2 (ja) 露光用フォトマスク
JP2568593Y2 (ja) 露光装置用ピン
JPS55113046A (en) Pattern forming method
JPS6244740A (ja) パタ−ン形成方法
JPH03108790A (ja) プリント配線板の露光方法
JPH08122941A (ja) 真空吸着盤
JPH019954Y2 (enrdf_load_stackoverflow)
JPS6472163A (en) Formation of thin film pattern
JPS6319860B2 (enrdf_load_stackoverflow)
JPS5588333A (en) Manufacture of x-ray exposing mask
JPS61124943A (ja) マスク
JPS5492063A (en) Manufacture of semiconductor device