JPS6140640B2 - - Google Patents

Info

Publication number
JPS6140640B2
JPS6140640B2 JP53066324A JP6632478A JPS6140640B2 JP S6140640 B2 JPS6140640 B2 JP S6140640B2 JP 53066324 A JP53066324 A JP 53066324A JP 6632478 A JP6632478 A JP 6632478A JP S6140640 B2 JPS6140640 B2 JP S6140640B2
Authority
JP
Japan
Prior art keywords
base material
susceptor
silicon nitride
silicon
carbon base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53066324A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54157778A (en
Inventor
Toshiro Kagami
Hideyasu Matsuo
Akio Karita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP6632478A priority Critical patent/JPS54157778A/ja
Publication of JPS54157778A publication Critical patent/JPS54157778A/ja
Publication of JPS6140640B2 publication Critical patent/JPS6140640B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Insulating Bodies (AREA)
JP6632478A 1978-06-02 1978-06-02 Susceptor Granted JPS54157778A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6632478A JPS54157778A (en) 1978-06-02 1978-06-02 Susceptor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6632478A JPS54157778A (en) 1978-06-02 1978-06-02 Susceptor

Publications (2)

Publication Number Publication Date
JPS54157778A JPS54157778A (en) 1979-12-12
JPS6140640B2 true JPS6140640B2 (enrdf_load_stackoverflow) 1986-09-10

Family

ID=13312534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6632478A Granted JPS54157778A (en) 1978-06-02 1978-06-02 Susceptor

Country Status (1)

Country Link
JP (1) JPS54157778A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57191292A (en) * 1981-05-19 1982-11-25 Toshiba Ceramics Co Ltd Graphite crucible for preparing single crystal of semiconductor
JPS62123094A (ja) * 1985-11-22 1987-06-04 Denki Kagaku Kogyo Kk ３―５属化合物半導体気相成長用サセプタ
JP3214422B2 (ja) * 1997-12-02 2001-10-02 日本電気株式会社 半導体装置の製造装置および半導体装置の製造方法

Also Published As

Publication number Publication date
JPS54157778A (en) 1979-12-12

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