JPS6139736B2 - - Google Patents

Info

Publication number
JPS6139736B2
JPS6139736B2 JP56114717A JP11471781A JPS6139736B2 JP S6139736 B2 JPS6139736 B2 JP S6139736B2 JP 56114717 A JP56114717 A JP 56114717A JP 11471781 A JP11471781 A JP 11471781A JP S6139736 B2 JPS6139736 B2 JP S6139736B2
Authority
JP
Japan
Prior art keywords
recess
semiconductor substrate
insulating film
glass layer
phosphosilicate glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56114717A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5815247A (ja
Inventor
Hajime Kamioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56114717A priority Critical patent/JPS5815247A/ja
Publication of JPS5815247A publication Critical patent/JPS5815247A/ja
Publication of JPS6139736B2 publication Critical patent/JPS6139736B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/0124—
    • H10W10/13—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
  • Weting (AREA)
  • Formation Of Insulating Films (AREA)
JP56114717A 1981-07-21 1981-07-21 半導体装置の製造方法 Granted JPS5815247A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56114717A JPS5815247A (ja) 1981-07-21 1981-07-21 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56114717A JPS5815247A (ja) 1981-07-21 1981-07-21 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5815247A JPS5815247A (ja) 1983-01-28
JPS6139736B2 true JPS6139736B2 (index.php) 1986-09-05

Family

ID=14644851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56114717A Granted JPS5815247A (ja) 1981-07-21 1981-07-21 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5815247A (index.php)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59157056A (ja) * 1983-02-26 1984-09-06 Chisso Corp 光学活性アルコ−ルのエステル
US4863562A (en) * 1988-02-11 1989-09-05 Sgs-Thomson Microelectronics, Inc. Method for forming a non-planar structure on the surface of a semiconductor substrate

Also Published As

Publication number Publication date
JPS5815247A (ja) 1983-01-28

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