JPS6136616B2 - - Google Patents

Info

Publication number
JPS6136616B2
JPS6136616B2 JP54093637A JP9363779A JPS6136616B2 JP S6136616 B2 JPS6136616 B2 JP S6136616B2 JP 54093637 A JP54093637 A JP 54093637A JP 9363779 A JP9363779 A JP 9363779A JP S6136616 B2 JPS6136616 B2 JP S6136616B2
Authority
JP
Japan
Prior art keywords
electric heater
upper layer
cavity
bridge
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54093637A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5618381A (en
Inventor
Mitsuteru Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP9363779A priority Critical patent/JPS5618381A/ja
Publication of JPS5618381A publication Critical patent/JPS5618381A/ja
Publication of JPS6136616B2 publication Critical patent/JPS6136616B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Heating Bodies (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP9363779A 1979-07-25 1979-07-25 Electric heater Granted JPS5618381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9363779A JPS5618381A (en) 1979-07-25 1979-07-25 Electric heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9363779A JPS5618381A (en) 1979-07-25 1979-07-25 Electric heater

Publications (2)

Publication Number Publication Date
JPS5618381A JPS5618381A (en) 1981-02-21
JPS6136616B2 true JPS6136616B2 (en, 2012) 1986-08-19

Family

ID=14087851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9363779A Granted JPS5618381A (en) 1979-07-25 1979-07-25 Electric heater

Country Status (1)

Country Link
JP (1) JPS5618381A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01239102A (ja) * 1988-03-18 1989-09-25 Mitsubishi Rayon Co Ltd 使い捨ておむつ

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5811139A (ja) * 1981-07-14 1983-01-21 東燃株式会社 金属蒸着ポリプロピレンフイルム
EP0076935B1 (en) * 1981-10-09 1989-07-19 Honeywell Inc. Integrated semiconductor device and method of fabricating said device
JPS5872059A (ja) * 1981-10-09 1983-04-28 ハネウエル・インコ−ポレ−テツド 半導体装置、流量計及びその製造方法
JPS58154652A (ja) * 1982-03-10 1983-09-14 Toshiba Corp 感ガス素子
JPS5957118A (ja) * 1982-09-28 1984-04-02 Japan Electronic Control Syst Co Ltd 流量計
JPS604814A (ja) * 1983-06-23 1985-01-11 Nippon Soken Inc 熱式流量検出装置
JPS6013220A (ja) * 1983-07-04 1985-01-23 Esutetsuku:Kk ガス流量センサ−及びその製造方法
JPS60142268A (ja) * 1983-12-27 1985-07-27 株式会社山武 流速センサ
US4576050A (en) * 1984-08-29 1986-03-18 General Motors Corporation Thermal diffusion fluid flow sensor
EP0176996B1 (en) * 1984-10-01 1991-06-05 Honeywell Inc. Semiconductor device, in particular semiconductor sensor and method for its fabrication
JPS6295454A (ja) * 1985-10-22 1987-05-01 Nippon Telegr & Teleph Corp <Ntt> マイクロガスセンサおよびその製造方法
JPS62159627U (en, 2012) * 1986-03-31 1987-10-09
JPH0257066U (en, 2012) * 1988-10-18 1990-04-25
JPH0795076B2 (ja) * 1989-05-23 1995-10-11 山武ハネウエル株式会社 流速センサ
EP0960718A4 (en) 1997-12-11 2002-01-09 Teijin Ltd BIAXIALLY ORIENTED POLYESTER FILM
JP4866191B2 (ja) * 2006-09-25 2012-02-01 シチズンホールディングス株式会社 ガスセンサ及びその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1439711A1 (de) * 1964-08-04 1968-11-28 Telefunken Patent Halbleiteranordnung mit geringer Nebenschlusskapazitaet
US4129848A (en) * 1975-09-03 1978-12-12 Raytheon Company Platinum film resistor device
JPS5389799A (en) * 1977-01-18 1978-08-07 Mitsubishi Electric Corp Combustible gas detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01239102A (ja) * 1988-03-18 1989-09-25 Mitsubishi Rayon Co Ltd 使い捨ておむつ

Also Published As

Publication number Publication date
JPS5618381A (en) 1981-02-21

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