JPS6131858B2 - - Google Patents
Info
- Publication number
- JPS6131858B2 JPS6131858B2 JP54168123A JP16812379A JPS6131858B2 JP S6131858 B2 JPS6131858 B2 JP S6131858B2 JP 54168123 A JP54168123 A JP 54168123A JP 16812379 A JP16812379 A JP 16812379A JP S6131858 B2 JPS6131858 B2 JP S6131858B2
- Authority
- JP
- Japan
- Prior art keywords
- weight
- deep ultraviolet
- pattern forming
- bisazide compound
- forming method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Polymerisation Methods In General (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16812379A JPS5691229A (en) | 1979-12-26 | 1979-12-26 | Pattern forming method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16812379A JPS5691229A (en) | 1979-12-26 | 1979-12-26 | Pattern forming method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5691229A JPS5691229A (en) | 1981-07-24 |
| JPS6131858B2 true JPS6131858B2 (enrdf_load_stackoverflow) | 1986-07-23 |
Family
ID=15862269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16812379A Granted JPS5691229A (en) | 1979-12-26 | 1979-12-26 | Pattern forming method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5691229A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5716446A (en) * | 1980-07-04 | 1982-01-27 | Fujitsu Ltd | Formation of micropattern and photoresist used in said formation |
| JPS58203438A (ja) * | 1982-05-24 | 1983-11-26 | Hitachi Ltd | 微細パタ−ン形成方法 |
-
1979
- 1979-12-26 JP JP16812379A patent/JPS5691229A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5691229A (en) | 1981-07-24 |
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