JPS6131419B2 - - Google Patents

Info

Publication number
JPS6131419B2
JPS6131419B2 JP56171835A JP17183581A JPS6131419B2 JP S6131419 B2 JPS6131419 B2 JP S6131419B2 JP 56171835 A JP56171835 A JP 56171835A JP 17183581 A JP17183581 A JP 17183581A JP S6131419 B2 JPS6131419 B2 JP S6131419B2
Authority
JP
Japan
Prior art keywords
moisture
initial
sensing
organosilicon compound
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56171835A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5872047A (ja
Inventor
Hidefusa Uchikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56171835A priority Critical patent/JPS5872047A/ja
Publication of JPS5872047A publication Critical patent/JPS5872047A/ja
Publication of JPS6131419B2 publication Critical patent/JPS6131419B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)
JP56171835A 1981-10-27 1981-10-27 感湿素子 Granted JPS5872047A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56171835A JPS5872047A (ja) 1981-10-27 1981-10-27 感湿素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56171835A JPS5872047A (ja) 1981-10-27 1981-10-27 感湿素子

Publications (2)

Publication Number Publication Date
JPS5872047A JPS5872047A (ja) 1983-04-28
JPS6131419B2 true JPS6131419B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-19

Family

ID=15930631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56171835A Granted JPS5872047A (ja) 1981-10-27 1981-10-27 感湿素子

Country Status (1)

Country Link
JP (1) JPS5872047A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0338801U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-08-24 1991-04-15

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60186748A (ja) * 1984-03-06 1985-09-24 Mitsubishi Electric Corp 感湿材料の製造方法
JPS61147143A (ja) * 1984-12-20 1986-07-04 Mitsubishi Electric Corp 感湿材料の製造方法
JPS6347646A (ja) * 1986-08-13 1988-02-29 Nok Corp 感湿素子
GB2220074B (en) * 1988-06-27 1992-01-08 Seiko Epson Corp Humidity sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0338801U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-08-24 1991-04-15

Also Published As

Publication number Publication date
JPS5872047A (ja) 1983-04-28

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