JPS6131417B2 - - Google Patents

Info

Publication number
JPS6131417B2
JPS6131417B2 JP56017911A JP1791181A JPS6131417B2 JP S6131417 B2 JPS6131417 B2 JP S6131417B2 JP 56017911 A JP56017911 A JP 56017911A JP 1791181 A JP1791181 A JP 1791181A JP S6131417 B2 JPS6131417 B2 JP S6131417B2
Authority
JP
Japan
Prior art keywords
humidity
moisture
sensing
sensitive
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56017911A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57132050A (en
Inventor
Hidefusa Uchikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56017911A priority Critical patent/JPS57132050A/ja
Publication of JPS57132050A publication Critical patent/JPS57132050A/ja
Publication of JPS6131417B2 publication Critical patent/JPS6131417B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Non-Adjustable Resistors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP56017911A 1981-02-09 1981-02-09 Humidity-sensitive element Granted JPS57132050A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56017911A JPS57132050A (en) 1981-02-09 1981-02-09 Humidity-sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56017911A JPS57132050A (en) 1981-02-09 1981-02-09 Humidity-sensitive element

Publications (2)

Publication Number Publication Date
JPS57132050A JPS57132050A (en) 1982-08-16
JPS6131417B2 true JPS6131417B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-19

Family

ID=11956927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56017911A Granted JPS57132050A (en) 1981-02-09 1981-02-09 Humidity-sensitive element

Country Status (1)

Country Link
JP (1) JPS57132050A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990038A (ja) * 1982-11-16 1984-05-24 Mitsubishi Electric Corp 感湿材料
JPS5990037A (ja) * 1982-11-16 1984-05-24 Mitsubishi Electric Corp 感湿材料
JPS59102149A (ja) * 1982-12-06 1984-06-13 Mitsubishi Electric Corp 感湿材料
JPS59114449A (ja) * 1982-12-21 1984-07-02 Murata Mfg Co Ltd 感湿抵抗体
JP2536064B2 (ja) * 1988-05-31 1996-09-18 エヌオーケー株式会社 薄膜感湿素子
CN106383149B (zh) * 2016-08-31 2020-04-07 中国科学院半导体研究所 基于钙钛矿纳米片阵列的湿度传感器件及其制备方法

Also Published As

Publication number Publication date
JPS57132050A (en) 1982-08-16

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