JPS6130421B2 - - Google Patents

Info

Publication number
JPS6130421B2
JPS6130421B2 JP55135415A JP13541580A JPS6130421B2 JP S6130421 B2 JPS6130421 B2 JP S6130421B2 JP 55135415 A JP55135415 A JP 55135415A JP 13541580 A JP13541580 A JP 13541580A JP S6130421 B2 JPS6130421 B2 JP S6130421B2
Authority
JP
Japan
Prior art keywords
semiconductor substrate
quartz carrier
blade
quartz
auxiliary holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55135415A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5759346A (en
Inventor
Shinsui Saruwatari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP13541580A priority Critical patent/JPS5759346A/ja
Publication of JPS5759346A publication Critical patent/JPS5759346A/ja
Publication of JPS6130421B2 publication Critical patent/JPS6130421B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)
JP13541580A 1980-09-29 1980-09-29 Auxiliary holder for semiconductor substrate Granted JPS5759346A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13541580A JPS5759346A (en) 1980-09-29 1980-09-29 Auxiliary holder for semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13541580A JPS5759346A (en) 1980-09-29 1980-09-29 Auxiliary holder for semiconductor substrate

Publications (2)

Publication Number Publication Date
JPS5759346A JPS5759346A (en) 1982-04-09
JPS6130421B2 true JPS6130421B2 (enrdf_load_stackoverflow) 1986-07-14

Family

ID=15151190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13541580A Granted JPS5759346A (en) 1980-09-29 1980-09-29 Auxiliary holder for semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5759346A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169633A (ja) * 1984-09-10 1986-04-10 Mitsubishi Electric Corp 薄板体の立替方法及びその立替装置
JPH0544315Y2 (enrdf_load_stackoverflow) * 1987-02-05 1993-11-10
JP2009073544A (ja) * 2007-09-22 2009-04-09 Konica Minolta Opto Inc 基板取り出し治具及び記録媒体用ガラス基板の製造方法
JP6209635B2 (ja) 2016-03-15 2017-10-04 日新製鋼株式会社 金属屋根材の強度試験方法、強度試験設備及び仮想強度試験プログラム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS577097Y2 (enrdf_load_stackoverflow) * 1976-09-27 1982-02-10

Also Published As

Publication number Publication date
JPS5759346A (en) 1982-04-09

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