JPS577097Y2 - - Google Patents

Info

Publication number
JPS577097Y2
JPS577097Y2 JP13035176U JP13035176U JPS577097Y2 JP S577097 Y2 JPS577097 Y2 JP S577097Y2 JP 13035176 U JP13035176 U JP 13035176U JP 13035176 U JP13035176 U JP 13035176U JP S577097 Y2 JPS577097 Y2 JP S577097Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13035176U
Other languages
Japanese (ja)
Other versions
JPS5348591U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13035176U priority Critical patent/JPS577097Y2/ja
Publication of JPS5348591U publication Critical patent/JPS5348591U/ja
Application granted granted Critical
Publication of JPS577097Y2 publication Critical patent/JPS577097Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Fire Alarms (AREA)
  • Emergency Alarm Devices (AREA)
JP13035176U 1976-09-27 1976-09-27 Expired JPS577097Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13035176U JPS577097Y2 (enrdf_load_stackoverflow) 1976-09-27 1976-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13035176U JPS577097Y2 (enrdf_load_stackoverflow) 1976-09-27 1976-09-27

Publications (2)

Publication Number Publication Date
JPS5348591U JPS5348591U (enrdf_load_stackoverflow) 1978-04-24
JPS577097Y2 true JPS577097Y2 (enrdf_load_stackoverflow) 1982-02-10

Family

ID=28739495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13035176U Expired JPS577097Y2 (enrdf_load_stackoverflow) 1976-09-27 1976-09-27

Country Status (1)

Country Link
JP (1) JPS577097Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759346A (en) * 1980-09-29 1982-04-09 Nec Kyushu Ltd Auxiliary holder for semiconductor substrate
JPS612341A (ja) * 1984-06-15 1986-01-08 Hitachi Ltd ウエハ移し換え治具

Also Published As

Publication number Publication date
JPS5348591U (enrdf_load_stackoverflow) 1978-04-24

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