JPH0546701B2 - - Google Patents

Info

Publication number
JPH0546701B2
JPH0546701B2 JP59176649A JP17664984A JPH0546701B2 JP H0546701 B2 JPH0546701 B2 JP H0546701B2 JP 59176649 A JP59176649 A JP 59176649A JP 17664984 A JP17664984 A JP 17664984A JP H0546701 B2 JPH0546701 B2 JP H0546701B2
Authority
JP
Japan
Prior art keywords
wafer
storage cassette
cassette
wafers
storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59176649A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6154639A (ja
Inventor
Tsutomu Hanno
Kiryo Sakuma
Shinya Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17664984A priority Critical patent/JPS6154639A/ja
Publication of JPS6154639A publication Critical patent/JPS6154639A/ja
Publication of JPH0546701B2 publication Critical patent/JPH0546701B2/ja
Granted legal-status Critical Current

Links

JP17664984A 1984-08-27 1984-08-27 半導体ウエ−ハ移し換え装置 Granted JPS6154639A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17664984A JPS6154639A (ja) 1984-08-27 1984-08-27 半導体ウエ−ハ移し換え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17664984A JPS6154639A (ja) 1984-08-27 1984-08-27 半導体ウエ−ハ移し換え装置

Publications (2)

Publication Number Publication Date
JPS6154639A JPS6154639A (ja) 1986-03-18
JPH0546701B2 true JPH0546701B2 (enrdf_load_stackoverflow) 1993-07-14

Family

ID=16017269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17664984A Granted JPS6154639A (ja) 1984-08-27 1984-08-27 半導体ウエ−ハ移し換え装置

Country Status (1)

Country Link
JP (1) JPS6154639A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3006714B2 (ja) * 1988-12-02 2000-02-07 東京エレクトロン株式会社 縦型基板移載装置及び縦型熱処理装置並びに縦型熱処理装置における基板移載方法
US5110248A (en) * 1989-07-17 1992-05-05 Tokyo Electron Sagami Limited Vertical heat-treatment apparatus having a wafer transfer mechanism

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5483371U (enrdf_load_stackoverflow) * 1977-11-17 1979-06-13
JPS5496157U (enrdf_load_stackoverflow) * 1977-12-19 1979-07-07

Also Published As

Publication number Publication date
JPS6154639A (ja) 1986-03-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term