JPS6226731Y2 - - Google Patents

Info

Publication number
JPS6226731Y2
JPS6226731Y2 JP1981131483U JP13148381U JPS6226731Y2 JP S6226731 Y2 JPS6226731 Y2 JP S6226731Y2 JP 1981131483 U JP1981131483 U JP 1981131483U JP 13148381 U JP13148381 U JP 13148381U JP S6226731 Y2 JPS6226731 Y2 JP S6226731Y2
Authority
JP
Japan
Prior art keywords
stage
mounting
semiconductor wafer
slider
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981131483U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5836711U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13148381U priority Critical patent/JPS5836711U/ja
Publication of JPS5836711U publication Critical patent/JPS5836711U/ja
Application granted granted Critical
Publication of JPS6226731Y2 publication Critical patent/JPS6226731Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
  • Drying Of Semiconductors (AREA)
JP13148381U 1981-09-03 1981-09-03 顕微鏡の載物台 Granted JPS5836711U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13148381U JPS5836711U (ja) 1981-09-03 1981-09-03 顕微鏡の載物台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13148381U JPS5836711U (ja) 1981-09-03 1981-09-03 顕微鏡の載物台

Publications (2)

Publication Number Publication Date
JPS5836711U JPS5836711U (ja) 1983-03-10
JPS6226731Y2 true JPS6226731Y2 (enrdf_load_stackoverflow) 1987-07-09

Family

ID=29925058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13148381U Granted JPS5836711U (ja) 1981-09-03 1981-09-03 顕微鏡の載物台

Country Status (1)

Country Link
JP (1) JPS5836711U (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS507055U (enrdf_load_stackoverflow) * 1973-05-18 1975-01-24
JPS5539021A (en) * 1978-09-14 1980-03-18 Hitachi Electronics Eng Co Ltd Automatic plate tester

Also Published As

Publication number Publication date
JPS5836711U (ja) 1983-03-10

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