Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP6123379ApriorityCriticalpatent/JPS55153344A/ja
Publication of JPS55153344ApublicationCriticalpatent/JPS55153344A/ja
Publication of JPS6129539B2publicationCriticalpatent/JPS6129539B2/ja
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
H01L21/76—Making of isolation regions between components
H01L21/763—Polycrystalline semiconductor regions
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Engineering & Computer Science
(AREA)
Manufacturing & Machinery
(AREA)
Physics & Mathematics
(AREA)
Crystallography & Structural Chemistry
(AREA)
Condensed Matter Physics & Semiconductors
(AREA)
General Physics & Mathematics
(AREA)
Chemical & Material Sciences
(AREA)
Computer Hardware Design
(AREA)
Microelectronics & Electronic Packaging
(AREA)
Power Engineering
(AREA)
Local Oxidation Of Silicon
(AREA)
Bipolar Transistors
(AREA)
Element Separation
(AREA)
JP6123379A1979-05-181979-05-18Manufacture of semiconductor device
GrantedJPS55153344A
(en)